Laminated solar cell and manufacturing method thereof

Abstract

The invention relates to a laminated solar cell and a manufacturing method thereof, which belong to the technical field of semiconductor devices and are used for improving the performance of solar cells. The technical scheme is that: the laminator solar cell comprises a substrate (1), and a bottom cell, a top cell, a transparent conductive antireflection coating (8) and a metal gate electrode (9) which are arranged on the substrate in turn, wherein the bottom cell is a membrane polycrystalline silicon hetero-junction cell and consists of an N<+> type heavily doped silicon membrane (2), an N type polycrystalline silicon membrane (3) and a first P type noncrystalline silicon membrane (4) which are deposited on the substrate in turn; and the top cell is a noncrystalline silicon P-I-N junction cell and consists of an N type noncrystalline silicon membrane (5), a noncrystalline silicon intrinsic absorbing layer (6) and a second P type noncrystalline silicon membrane (7) which are deposited on the bottom cell in turn. The method enhances the stability of the cell, can greatly save raw materials, increases the open circuit voltage and the short circuit current of the cell and obtains higher conversion efficiency.

Description

[0001] Technical field: [0002] The invention relates to a stacked solar cell and a manufacturing method thereof, belonging to the technical field of semiconductor devices. Background technique: [0003] At present, large-scale industrialized thin-film batteries are generally amorphous silicon thin-film batteries. The battery itself has a light-induced degradation effect, and the degradation of a single-junction battery can reach about 20%-30%, which severely limits the further development of amorphous silicon thin-film batteries. [0004] The light-induced degradation of amorphous silicon cells can be effectively alleviated by adopting a stacked structure. There are two known stacked cells, one is to connect two P-I-N junctions of amorphous silicon in series to form an amorphous / amorphous stacked cell, in which the thickness of each sub-cell is smaller than that of a single-junction cell, which increases the size of the cell. The built-in electric field reduces the recom...

AI Technical Summary

Problems solved by technology

However, since there are many tiny grains inside the microcrystalline silicon, the density of defect states at the grain boundaries between the grains is high, and the recombination probability of carriers at the grain boundaries is relatively high, resulting in the open circuit voltage of the microcrystalline silicon cell being only about 0.5V. , which limits the further improvement of the battery efficiency of this structure

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