Monolithically integrated multi-wavelength differential quadrature phase shift keying (DQPSK) demodulator and manufacturing method thereof

Abstract

The invention relates to a monolithically integrated multi-wavelength differential quadrature phase shift keying (DQPSK) demodulator and a manufacturing method thereof. The demodulator is provided with a 1*D wavelength division demultiplexer and D DQPSK demodulators which are integrated on the same waveguide substrate to form a waveguide structure chip. The method comprises the following steps of: monolithically integrating the wavelength division demultiplexer AWG and a plurality of multi-wavelength optical DQPSK demodulators with delay line interferometers on the same waveguide substrate by planar optical waveguide technology to manufacture the waveguide structure chip; manufacturing a metal film micro-heater on one of two arms of each optical delay line interferometer forming the DQPSK demodulator by a photoetching, sputtering and stripping semiconductor process to realize phase control; adhering a thermoelectric cooler (TEC) to a chip substrate to control the temperature of the whole chip; and respectively connecting the metal film micro-heater and the TEC with an error signal from a control feedback loop. The DQPSK demodulator has low cost, the process is simple and the method contributes to mass production.

Description

technical field [0001] The present invention relates to a keying demodulator. In particular, it relates to a monolithic integrated multi-wavelength differential quadrature phase shift keying demodulator capable of converting a differential quadrature phase shift keying signal into an intensity modulation signal and a manufacturing method thereof. Background technique [0002] The modulation format of the new differential phase shift keying is a very attractive modulation format for high-speed optical data transmission, which is attracting great attention in the industry. Compared with other major modulation formats NRZ, RZ, CSRZ and ODB, DPSK / DQPSK has obvious comprehensive advantages in dispersion tolerance, PMD tolerance, nonlinear resistance, noise resistance, transmission distance and receiving sensitivity. Therefore, after the historical experiment of DPSK in Bell Labs was published in March 2002, more and more scientific research organizations and enterprises have inv...

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Problems solved by technology

[0004] At present, in a 40G DWDM network with 80 / 96 channels, 80 / 96 discrete optical demodulators and wavelength division multiplexers are required to receive DPSK / DQPSK optical signals. There is also a patent (US 0216988 A1) that proposes to use only one / two optical delay interferometers (ODLI) to realize multi-wavelength applications without multiple demodulators, but it needs to control each of the optical transmitters separately. The wavelength of each laser makes it match the wavelength of ODLI, which greatly increases the difficulty and complexity of control

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