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Filling control method of semiconductor production lines

A control method and production line technology, applied in the directions of adaptive control, general control system, control/regulation system, etc., can solve the problem of not being able to respond well to various emergencies, and achieve improved efficiency, simple design process, and predictive ability. Enhanced effect

Inactive Publication Date: 2011-04-20
BEIJING UNIV OF CHEM TECH
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Problems solved by technology

[0006] The purpose of the present invention is to provide a method for controlling the feeding of semiconductor production lines to solve the problem that the currently used method cannot cope well with various emergencies during feeding control, thereby providing a more effective intelligent semiconductor production line control method

Method used

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  • Filling control method of semiconductor production lines
  • Filling control method of semiconductor production lines
  • Filling control method of semiconductor production lines

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Embodiment Construction

[0039] In order to better understand the technical solutions of the present invention, the implementation manners of the present invention will be further introduced below in conjunction with the accompanying drawings.

[0040] Taking a semiconductor production line model as the object, the feeding control research is carried out. On the eM-Plant simulation platform, the simulation calculation is performed 24 hours a day, and the simulation time is 1 year.

[0041] see figure 1 As shown, it is a schematic diagram of the fuzzy Petri net modeling process of semiconductor production line feeding in the present invention. figure 2 It is a structural schematic diagram of the online feeding mechanism of the semiconductor production line in the present invention.

[0042] Through experimental analysis, the following decision rules can be extracted:

[0043] 1. If the average WIP is much higher than the set value (empirical average WIP) when the bottleneck equipment is fully loade...

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Abstract

The invention provides a filling control method of semiconductor production lines, using a fuzzy Petri network technology to perform on-line filling control of the production lines. The method comprises the following steps of: establishing a filling fuzzy Petri network inference model, establishing an on-line filling mechanism of the semiconductor production lines, setting parameters of the fuzzy Petri network inference model, confirming a fuzzy inference condition warehouse set of the filling Petri network model according to uncertain events of an actual semiconductor production system, confirming an inference conclusion warehouse set of the filling Petri network according to the conclusion obtained in the confirmed inference condition, simultaneously gathering the inference rule set by abstracting and accumulating filling decision rules, establishing the filing fuzzy Petri network inference model, judging periodicity decisions by using the filing fuzzy Petri network inference model, starting the model once the accidents occur, and judging whether to modify and self-modify the filling plan or not according to the credibility of each conclusion warehouse. The method is simple in design process, easy in realization and good in robustness; meanwhile, the efficiency of the semiconductor production line is improved; the precognition capability is enhanced; and the integrity is correspondingly improved.

Description

technical field [0001] The invention relates to a method in the field of automatic control and information technology, in particular to a method for controlling feeding of semiconductor production lines, which belongs to the field of advanced manufacturing technology. technical background [0002] The semiconductor production line is currently recognized as one of the most complex production lines in the world. Compared with other manufacturing systems, the semiconductor production line has obvious characteristics such as complex process flow, multiple entry processing flow, mixed processing mode and high uncertainty, which makes its scheduling problem complex and belongs to NP problem. There are mainly three types of scheduling on semiconductor production lines: feeding control, path scheduling, and workpiece scheduling. The feeding control is in the "leading" position of the entire dispatching system, and is used to decide when and how many types of raw materials are put ...

Claims

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Application Information

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IPC IPC(8): G05B13/04
Inventor 曹政才王民吴启迪赵会丹彭亚珍靳保
Owner BEIJING UNIV OF CHEM TECH
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