Processing method of detecting samples

Abstract

The invention provides a processing method of a detecting sample, comprising the following steps: providing a detecting sample; and coating an organic thin film on the detecting sample surface. The processing method has the advantages of being simple and practical, having low cost, effectively avoiding oxidizing reaction due to the detecting sample in contact with oxygen in air, and ensuring the quality of the detecting sample.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a processing method for detection samples. Background technique [0002] In the manufacturing process of integrated circuits, various process factors are often interlocking, that is to say, the defects produced in the previous process step often also produce relative defects in the next process, so that the final product is finished. rate problem. Therefore, being able to analyze the defects that have occurred in real time, find out the cause of the defects, and eliminate them has become one of the core capabilities of product quality assurance. With the continuous shrinking of the size of semiconductor devices, the size of defects caused by the semiconductor process and enough to affect the yield is also continuously miniaturized. Under this trend, it has become more and more difficult to make accurate cross-sectional analysis of these tiny defects. Therefore, v...

AI Technical Summary

Problems solved by technology

First of all, after the test sample is produced, if the operator cannot perform the failure analysis process immediately due to some factors, and during this period, the copper interconnection is very likely to react, resulting in failure analysis.

Secondly, after the test sample is made, it is generally not only a failure analysis, but repeated failure analysis is often required. Once the metal interconnection line is removed, it is impossible to perform multiple failure analysis for the metal interconnection line of a test sample. Measurement

[0006] The industry also adopts another method to process the test samples, which is to store the test samples with metal interconnections in a nitrogen cabinet to avoid the contact of copper interconnects with oxygen and moisture in the air, and to prevent the chemical reaction between copper and oxygen. However, although this method of processing test samples can better solve the problem of copper oxidation, the cost is very high. Not only does it need to purchase a nitrogen cabinet to store the test samples, but also needs to continuously feed nitrogen into the nitrogen cabinet.

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