Substrate film-coating processing system

Abstract

The invention provides a substrate film-coating processing system which comprises a cavity body, heaters, a gate valve assembly, substrate transmission devices, a vacuum extractor, a film thickness detector, an evaporation source and a controller, wherein the cavity body sequentially comprises a feeding cavity, an initial heating cavity, an organic film-coating cavity, an inorganic film-coating cavity, a cooling cavity and a discharge cavity which are communicated with each other to form a substrate transfer passage; the heaters are respectively arranged on the initial heating cavity, organicfilm-coating cavity and inorganic film-coating cavity; the gate valve assembly comprises a plurality of gate valves which respectively seal the initial heating cavity, organic film-coating cavity, inorganic film-coating cavity and cooling cavity; the substrate transmission devices are respectively arranged on the substrate transfer passage; the vacuum extractor is communicated with the initial heating cavity and the cooling cavity; both the film thickness detector and the evaporation source are arranged on the organic film-coating cavity and the inorganic film-coating cavity; and the controller is used for controlling the heaters, gate valves, substrate transmission devices, vacuum extractor, film thickness detector and evaporation source. The substrate film-coating processing system can integrate the organic and inorganic coating by evaporation, and can ensure the uniformity of the film coated on the substrate.

Description

technical field [0001] The invention relates to a coating treatment system, in particular to a substrate coating treatment system for coating a substrate in an organic light-emitting display device. Background technique [0002] OLED (full name in English: Organic Light-Emitting Diode, Chinese name: Organic Light-Emitting Diode) has been widely used on the display screen of digital products due to its light and thin, power-saving and other characteristics, and has a large market potential. At present, the application of OLED in the world is focused on flat-panel displays, because OLED is the only technology that can be compared with TFT-LCD in application, and it is the only one among all display technologies that can produce large-size, high-brightness, high-resolution displays. The display technology of the soft screen can be made into the same thickness as paper. Therefore, OLED display technology is the development direction of future display technology. [0003] Among...

AI Technical Summary

Problems solved by technology

[0004] At present, the existing substrate coating equipment for coating the substrate of OLED devices can only perform organic evaporation or inorganic evaporation on the substrate, and cannot effectively combine organic evaporation and inorganic evaporation. In order to realize the organic evaporation and inorganic evaporation process of the substrate of the OLED device; at the same time, the existing substrate coating equipment cannot detect the thickness of the substrate in the coating in real time, so the coating thickness of the substrate cannot be monitored in real time , thus affecting the uniformity of substrate coating thickness

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