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Improved development process for light beam homogenization device

A beam and laser beam technology, applied in optics, optical components, instruments, etc., can solve problems such as restricted processing capability, difficulty in ensuring lens curvature and surface accuracy, and difficulty in obtaining uniformity of light spots.

Inactive Publication Date: 2011-05-11
TSINGHUA UNIV
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Problems solved by technology

However, as the number of units increases, the processing difficulty of the cylindrical lens array increases sharply, and it is difficult to guarantee the curvature and surface accuracy of each unit lens in practice.
Therefore, limited by the processing capacity, it is difficult to obtain a spot with extremely high energy distribution uniformity
[0010] Second, if a coherent light source is used, due to the influence of coherence, it is easy to form speckle on the 108 plane, thus weakening the homogenization effect

Method used

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  • Improved development process for light beam homogenization device
  • Improved development process for light beam homogenization device
  • Improved development process for light beam homogenization device

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Embodiment Construction

[0025] The purpose of the present invention is to propose an improved optical device for laser beam homogenization, which can be used in laser annealing equipment or other occasions where the beam needs to be homogenized. Adding the pre-homogenization link in the system, as well as the organic combination of different types of homogenization principle schemes, not only greatly reduces the processing difficulty of each optical element in the homogenization system, but also can obtain better homogenization effect.

[0026] The pre-homogenization link device proposed by the present invention is located before the common optical homogenization system, and it performs preliminary homogenization on the light beam and then enters the subsequent optical system to obtain further homogenization. In this way, through multi-level homogenization, a light spot with extremely high uniformity is finally obtained, and at the same time, the requirement for processing capacity is reduced.

[002...

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Abstract

The invention relates to an improved development process for a light beam homogenization device. The device can be applied to laser annealing or other fields having demand on homogenizing light beams. The improved development process provided by the invention is characterized in that the pre-homogenization process is introduced, a random phase plate, a lens array and an integral rod are organically combined, multistage homogenization is carried out on the light beams and the coherence influence is eliminated, thus the effect of homogenizing light beams is greatly increased, the demand on processing lens array is reduced, and the cost is lowered.

Description

technical field [0001] The invention belongs to a laser beam homogenization device, which improves the existing beam homogenization device and is suitable for laser processing fields such as laser annealing or other occasions where laser beam homogenization is required. Background technique [0002] In recent decades, integrated circuit manufacturing has followed Moore's law and experienced rapid growth. The development of integrated circuits has driven the continuous progress of the entire electronics industry. The rapid development of the electronics industry has become a major engine driving the country's economic growth. However, due to the continuous improvement of the manufacturing precision of integrated circuits, it has also brought great difficulties and challenges in terms of extremely small size process technology. [0003] At present, the manufacture of very large scale integrated circuits has entered the stage of 32nm and below. For the technology node of 32nm,...

Claims

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Application Information

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IPC IPC(8): G02B27/09G02B27/28
Inventor 尉昊赟黄威李岩
Owner TSINGHUA UNIV
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