Miniature integrated temperature control type CO2 gas sensor and manufacturing method thereof
A gas sensor and temperature-controlled technology, which is applied in the field of micro-integrated temperature-controlled CO2 gas sensor and preparation, to achieve the effects of stable process, simplified processing technology and low cost
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[0024] Such as figure 1 Shown, a micro-integrated temperature-controlled solid electrolyte CO based on MEMS technology 2 Gas sensor on a silicon substrate (with SiO on both sides 2 ) 1Si deposition on both sides 3 N 4 Layer 2, Si is etched away by dry etching 3 N 4 Layer, wet etching process to process the heat dissipation window 8 structure, Si on the other side of the silicon substrate 3 N 4 Pt heating electrode 9 and temperature measuring electrode 10 are processed by photolithography lift-off process on the layer, and then SiO is deposited 2 The insulating protective layer 7 covers the Pt heating electrode and the Pt temperature measuring electrode, and exposes the wiring board 11. 2 Li is deposited on layer 7 3 PO 4 Solid electrolyte film 3, and prepare two Pt conductive films 4 on it, and finally prepare Li on the two conductive films. 2 CO 3 Reaction electrode 5 and Li 2 TiO 3 / TiO 2 Reference electrode 6.
[0025] Such as figure 2 As shown, the pattern of the Pt heating ele...
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