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Miniature integrated temperature control type CO2 gas sensor and manufacturing method thereof

A gas sensor and temperature-controlled technology, which is applied in the field of micro-integrated temperature-controlled CO2 gas sensor and preparation, to achieve the effects of stable process, simplified processing technology and low cost

Inactive Publication Date: 2011-06-15
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the problems of material matching, system integration, preparation process, compensation method, etc., there is no micro-integrated temperature-controlled solid electrolyte CO2 that can work independently and be successfully applied. 2 gas sensor

Method used

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  • Miniature integrated temperature control type CO2 gas sensor and manufacturing method thereof
  • Miniature integrated temperature control type CO2 gas sensor and manufacturing method thereof
  • Miniature integrated temperature control type CO2 gas sensor and manufacturing method thereof

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Embodiment Construction

[0024] Such as figure 1 As shown, a micro-integrated temperature-controlled solid electrolyte CO based on MEMS technology 2 Gas sensor, on a silicon substrate (with SiO on both sides 2 )1 double-sided deposited Si 3 N 4 Layer 2, by dry etching away the Si 3 N 4 Layer, wet etching process to process the thermal window 8 structure, on the other side of the silicon substrate Si 3 N 4 The Pt heating electrode 9 and the temperature measuring electrode 10 are processed by a photolithographic lift-off process on the layer, and then SiO is deposited. 2 The insulating protective layer 7 covers the Pt heating electrode and the Pt temperature measuring electrode, and exposes the junction pad 11, after which the SiO 2 Deposit Li on layer 7 3 PO 4 Solid electrolyte film 3, and prepare two Pt conductive thin films 4 thereon, prepare Li respectively on two conductive thin films 2 CO 3 Reaction electrode 5 and Li 2 TiO 3 / TiO 2 Reference electrode 6.

[0025] Such as figure 2...

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Abstract

The invention discloses a miniature integrated temperature control type CO2 gas sensor and a manufacturing method thereof. The sensor comprises a miniature integrated temperature control type device and a high-temperature work film type solid electrolyte air-sensitive element and is characterized in that: the miniature integrated temperature control type device consists of a silicon substrate, a SiO2 layer, a Si3N4 layer, a Pt heater and a temperature measuring element which are processed by a micro electro mechanical system (MEMS) process; and on a miniature integrated temperature control structure, a film type solid electrolyte CO2 air-sensitive element is formed by a micromachining process deposition SiO2 layer, an Li3PO4 solid electrolyte film, a Pt metal electrode, a reaction electrode Li2CO3 and a reference electrode Li2TiO3 / TiO2. A closed loop control system is formed by the feedback of the Pt heater and the temperature measuring element to make the temperature of the sensor reach the specified temperature required by working, keep the temperature constant and ensure the optimal performance of the CO2 gas sensor.

Description

technical field [0001] The invention relates to a micro-integrated temperature-controlled solid electrolyte CO 2 Gas sensor structure and fabrication method. Background technique [0002] Solid electrolytes have been widely used in gas sensors due to their good ionic conductivity, since Faraday first discovered PbF in 1834 2 Since the law of electrical conductivity changing with temperature, many research groups at home and abroad have begun to devote themselves to research in this area, and solid electrolyte gas sensors have become one of the important development directions. Currently CO 2 Conventional solid electrolyte gas sensors have made great progress, and there are CO2 prepared by traditional processing methods on the market. 2 Sensor products, these sensors use traditional processing techniques such as sintering, bonding, etc. to integrate solid electrolytes, electrodes, heaters, etc., which makes the sensors have problems such as large size, high power consumpti...

Claims

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Application Information

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IPC IPC(8): G01N27/26B81C1/00
Inventor 王海容任军强蒋庄德孙国良岑迪门光飞
Owner XI AN JIAOTONG UNIV
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