Radio frequency micro electro mechanical system switch with spring plate contact and manufacturing method thereof

Abstract

The invention relates to a radio frequency micro electro mechanical system switch with spring plate contact and a manufacturing method thereof, belonging to the field of electronic circuit technologies and micro electro mechanical system technologies. The invention aims to improve the power processing capability and reliability of a static driven contact type radio frequency micro electro mechanical system switch. In order to achieve the aim, the invention provides a radio frequency micro electro mechanical system switch comprising an anchor region, a cantilever beam and a static driven electrode; the switch comprises at least one set of contact device; the contact device comprises a spring plate contact, a fixed contact and a pit; the spring plate contact is positioned above the fixed contact; and the pit is arranged on the spring plate contact. According to the radio frequency switch provided by the invention, by combining a structure for increasing a contact surface on the basis of improving a contact material, the contact force and contact area are increased, and the contact resistance is reduced, thereby increasing the power processing capability of the switch and improving the reliability of the switch.

Description

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AI Technical Summary

Benefits of technology

The technical effect of this patented inventor's new type material called AuCuNi alloy (AuCu Ni) was developed during research into making contacts between two conductors made up of different types of metallic elements like copper, nickels, etc., which resulted in improved performance over previous methods such as silver plating and soldering techniques. This improvement led to increased energy transfer capabilities and higher efficiency in electronic devices while reducing their impact on human health caused by electromagnetic interference. Overall, these improvements lead to better quality products and more reliable operation under extreme conditions.

Problems solved by technology

This patents describes different types of electrostatic actuated (EML) MEMS devices called RFMEMS switchs. These include smaller sizes than previous designs like solenoid valves, allowing for more compact design without requiring bulky components. They use less electric power while still maintaining excellent performance over longer periods of time. However they may experience issues during operation at extreme temperatures where conventional EMI shielded semiconductor electronics cannot work properly. To address these concerns, an improved method involving copper plating was developed by researchers working on similar principles.

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