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Auxiliary pressurizing device for chip bonding

A pressurizing device and chip bonding technology, which is applied in microstructure devices, manufacturing microstructure devices, decorative arts, etc., can solve the problems of uneven stress, insufficient bonding strength, etc., and achieves low production cost and strong bond Combine strength and success rate, the effect of high success rate

Inactive Publication Date: 2013-05-15
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide an auxiliary pressure device for chip bonding in view of the disadvantages of uneven force and insufficient bonding strength in the bonding of microfluidic chips at room temperature

Method used

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  • Auxiliary pressurizing device for chip bonding
  • Auxiliary pressurizing device for chip bonding
  • Auxiliary pressurizing device for chip bonding

Examples

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Embodiment

[0018] A chip bonding auxiliary pressure device of the present invention, such as figure 1 As shown, it includes a limit block 1, a chassis 2, a conical joint 3, a compression nut 5, a compression plate 6, a square positioning rod 7, a connecting rod 8, and a limit bolt 10.

[0019] The limit block 1 is fixed vertically to the chassis 2, and the positioning concave platform for fixing the microfluidic chip is processed on the chassis 2. The concave surface of the positioning concave platform is polished, and the surface of the substrate 4 and the cover sheet 12 to be bonded are activated and merged. Chips are put into the positioning concave platform of the chassis 2. The bottom surface of the pressing plate 6 is a plane, and the center of the upper surface is processed with a conical groove. The pressing plate 6 is pressed on the cover piece 12; a limiting groove is opened on the limiting block 1. , the limit groove is processed with a positioning through groove, the slotting...

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Abstract

The invention relates to an auxiliary pressurizing device for chip bonding, belonging to the field of microfluidic chip processing technology. The auxiliary pressurizing device provided by the invention comprises a limit block, a chassis, a conical joint, a compaction nut, a compaction plate, a square positioning rod, a connecting rod and a limit bolt, wherein the limit block and the chassis are vertically fixed; a chip to be bonded is placed in a positioning concave platform of the chassis; the compaction plate is pressed on a cover sheet; the limit bolt passes through a limit hole and is inthreaded connection with the compaction nut; the lower end of the limit bolt fixes the conical joint; one end of the square positioning rod is inserted into a limit groove at the front end of the limit block and is fixed by screwing a positioning bolt; and the other end of the square positioning rod passes through a square connection hole of the connecting rod and is fixed by screwing a positioning bolt. The device provided by the invention effectively enhances the bonding strength and success rate of a normal-temperature bonding key, and can be widely used for the bonding auxiliary pressurization of the microfluidic chip.

Description

technical field [0001] The invention relates to a chip bonding auxiliary pressurizing device, in particular to a chip room temperature bonding auxiliary pressurizing device specially designed for microfluidic chips with low bonding efficiency and low bonding strength at room temperature. Microfluidic chip processing technology field. Background technique [0002] Micro Total Analysis System (μ-TAS) is one of the most far-reaching major scientific and technological developments since the mid-1990s. It is an integration of microelectronics, biology, physics, chemistry, and computer science. Highly cross-cutting new technologies. Through the miniaturization and integration of chemical analysis equipment, the functions of the analysis laboratory are transferred to the portable analysis equipment to the greatest extent, and finally the functions of the entire biochemical analysis laboratory are integrated on a microchip, so it is also called "Lab-on-a-chip" (Lab-on-a-chip, LOC)...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00G01N35/00
Inventor 邓玉林徐建栋丁惠李勤耿丽娜
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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