Reaction chamber with external heating mode for metal organic chemical vapor deposition system
A metal-organic chemistry and vapor deposition technology, which is applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of high material requirements for heating parts, shortening the service life of heating parts, and pollution sources of heating parts, etc. Achieve the effect of improving gas utilization rate, improving uniformity and avoiding pollution
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[0021] Example 1
[0022] The internal structure of the MOCVD reaction chamber in the external heating mode of the present invention is as follows figure 1 As shown, it includes a quartz protection cavity outer cylinder (4) and a quartz reaction cavity inner cylinder (6, 11) and its upper and lower flanges (3, 12), an external heating body (9) and its lifting mechanism (14, 16) , A substrate tray (10) and its rotating mechanism (15), a heat-reflective interlayer or insulation material (5), an inert protective gas inlet (1), two reactive gas inlets (2) and an exhaust port (13).
[0023] The reaction chamber of the invention has a double-layer structure, the outer layer is a quartz protective cavity outer cylinder, the inner layer is a quartz reaction cavity inner cylinder, and a substrate tray for placing the substrate (8) is installed in the reaction cavity inner cylinder cavity.
[0024] The outer cylinder of the protection cavity is cylindrical, and the upper and lower ends are sea...
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