Optical deflecting device
A light deflection device and ordinary light technology, applied in optics, nonlinear optics, instruments, etc.
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[0022] First, the structure and manufacturing method of the light deflecting liquid crystal cell described in the first embodiment of the present invention will be described.
[0023] figure 1 It is a sectional view in the thickness direction schematically showing the light deflection liquid crystal cell of the first embodiment. A pair of glass substrates formed with transparent electrodes (glass substrate 1 formed with transparent electrodes 2 and glass substrate 11 formed with transparent electrodes 12 ) were prepared. The glass substrates 1 and 11 are alkali-free glass and each have a thickness of 0.7 mmt. The transparent electrodes 2 and 12 are formed of indium tin oxide (ITO) and each have a thickness of 150 nm.
[0024] It is preferable that the patterns of the transparent electrodes 2 and 12 are formed in a desired planar shape. The ITO film can be patterned by, for example, wet etching using ferric chloride or a method of removing excess ITO film with a laser.
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