Three-dimensional surface topography measurement device based on one-dimensional Dammann grating

Abstract

The invention discloses a three-dimensional surface topography measurement device based on one-dimensional Dammann grating. A one-dimensional Dammann grating is inserted between a collimated laser source and a measured object, and the measured object and a reference surface are placed on a Fourier transform plane of a collimating lens. A charge coupled device (CCD) receives structured light reflected by the object, and the imaging relative distance of reflecting points of the reference surface and the actual object surface on a CCD target surface is used for determining the relative distance between the reflecting point of the object surface and the reflecting point of the reference surface. The Dammann grating is used for equally dividing the light intensity of the light source into multiple parts so as to acquire high spatial resolution at the same time of realizing multi-point scanning. Moreover, because the relative distance of diffraction spots of each level of the Dammann grating is strictly fixed, the rotating error of a vibrating mirror during single-point scanning is furthest reduced. The device has high measurement precision and spatial resolution, greatly improves the scanning efficiency, and has important practical significance.

Description

technical field [0001] The invention relates to a laser scanning three-dimensional object surface profile measurement device, in particular to a three-dimensional surface profile measurement device based on a one-dimensional Daman grating. [0002] High-efficiency scanning technology based on spectroscopic devices. While improving the scanning efficiency, the requirements for the intensity of the light source are relatively low, and at the same time, it has high measurement accuracy and spatial resolution. Therefore, it can be widely used in optical scanning measurement systems, especially in the acquisition of information on the three-dimensional surface topography of long-distance and large-scale objects, such as the acquisition of three-dimensional digital information on ground buildings, terrain and landforms on aircraft, and many on satellites. Point laser scanning obtains three-dimensional information of the lunar surface and many other fields. Background technique ...

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Problems solved by technology

However, with this projection method, the lighting system has too high requirements on the uniformity of the light source, resulting in a large increase in the cost of the lighting system, and cannot be applied to occasions where the brightness of the light source is uneven.

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