Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Super-hydrophobic silicon micron-nano composite structure and preparation method thereof

A composite structure, super-hydrophobic technology, applied in microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems of uncontrollable morphology of silicon micro-nano composite structure, and achieve the effect of low cost

Inactive Publication Date: 2011-08-31
NORTHWESTERN POLYTECHNICAL UNIV
View PDF5 Cites 27 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above method is low in cost, but the morphology of the obtained silicon micro-nano composite structure is uncontrollable

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof
  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof
  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] The superhydrophobic silicon micro-nano composite structure in this embodiment is: a superhydrophobic silicon micro-nano composite structure, the silicon surface has 100×100 square column array microstructures, each microstructure has a side length of a=20 μm, and a height of h= 20 μm, the lateral distance between two adjacent microstructures is b1=40 μm, the vertical distance is b2=80 μm, and there are columnar nanostructures on the surface of each microstructure.

[0033] In this embodiment, a method for preparing a silicon superhydrophobic micro-nano composite structure comprises the following steps:

[0034] Step 1: Make a reticle: make the array microstructure size parameters a=20 μm, b1=40 μm, b2=80 μm through the reticle design;

[0035] Step 2: Photolithography: Photolithography is carried out through processes such as gluing, pre-baking, exposure, development, and post-baking, and the pattern of the mask plate is copied to the photoresist on the surface of the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a super-hydrophobic silicon micron-nano composite structure and a preparation method thereof, which belong to the nano material preparation field. The structure is a micron-nano composite structure composed of square column array micron structures on the surface of silicon and columnar nano structures on each micron structure. The preparation method is relatively low is cost, can realize the controllable preparation of the periodic array silicon micron-nano composite structure, and is compatible with micro-electronic and micro-electro-mechanical technologies, thereby providing an effective means for the deep research on the influence of geometrical morphology on wettability; and the preparation method omits surface modification, and the super-hydrophobic property can be obtained by simply changing the structural topography of the surface, thereby laying the foundation for the application of the surface of the super-hydrophobic silicon micron-nano composite structure in the field of micro-electro-mechanical systems and the like.

Description

technical field [0001] The invention relates to a superhydrophobic silicon micro-nano composite structure and a preparation method thereof, belonging to the field of nanomaterial preparation. Background technique [0002] Generally, a solid surface with a water contact angle greater than 150° is called a superhydrophobic surface. It has been proved that a simple and effective method to achieve superhydrophobicity is to prepare micro-nanostructures on solid surfaces. The surface of many plant leaves is very hydrophobic, the most typical is the surface of the lotus leaf, the contact angle between the water droplet and the leaf surface is greater than 150°, and the water droplet is easy to roll off, this super-hydrophobic phenomenon is called the lotus leaf effect . [0003] The surface of superhydrophobic silicon micro-nano composite structure has important application requirements in micro-nano electromechanical systems. In the process of microfabrication, the release of a...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): B81B7/04B81C1/00B82Y30/00B82Y40/00
Inventor 何洋姜澄宇张峰尹恒许陈俊王圣坤胡培军苑伟政田梦君
Owner NORTHWESTERN POLYTECHNICAL UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com