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Super-hydrophobic silicon micron-nano composite structure and preparation method thereof

A composite structure, super-hydrophobic technology, applied in microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problems of uncontrollable morphology of silicon micro-nano composite structure, and achieve the effect of low cost

Inactive Publication Date: 2011-08-31
NORTHWESTERN POLYTECHNICAL UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The above method is low in cost, but the morphology of the obtained silicon micro-nano composite structure is uncontrollable

Method used

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  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof
  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof
  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof

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Embodiment 1

[0032] The superhydrophobic silicon micro-nano composite structure in this embodiment is: a superhydrophobic silicon micro-nano composite structure, the silicon surface has 100×100 square column array microstructures, each microstructure has a side length of a=20 μm, and a height of h= 20 μm, the lateral distance between two adjacent microstructures is b1=40 μm, the vertical distance is b2=80 μm, and there are columnar nanostructures on the surface of each microstructure.

[0033] In this embodiment, a method for preparing a silicon superhydrophobic micro-nano composite structure comprises the following steps:

[0034] Step 1: Make a reticle: make the array microstructure size parameters a=20 μm, b1=40 μm, b2=80 μm through the reticle design;

[0035] Step 2: Photolithography: Photolithography is carried out through processes such as gluing, pre-baking, exposure, development, and post-baking, and the pattern of the mask plate is copied to the photoresist on the surface of the ...

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Abstract

The invention discloses a super-hydrophobic silicon micron-nano composite structure and a preparation method thereof, which belong to the nano material preparation field. The structure is a micron-nano composite structure composed of square column array micron structures on the surface of silicon and columnar nano structures on each micron structure. The preparation method is relatively low is cost, can realize the controllable preparation of the periodic array silicon micron-nano composite structure, and is compatible with micro-electronic and micro-electro-mechanical technologies, thereby providing an effective means for the deep research on the influence of geometrical morphology on wettability; and the preparation method omits surface modification, and the super-hydrophobic property can be obtained by simply changing the structural topography of the surface, thereby laying the foundation for the application of the surface of the super-hydrophobic silicon micron-nano composite structure in the field of micro-electro-mechanical systems and the like.

Description

technical field [0001] The invention relates to a superhydrophobic silicon micro-nano composite structure and a preparation method thereof, belonging to the field of nanomaterial preparation. Background technique [0002] Generally, a solid surface with a water contact angle greater than 150° is called a superhydrophobic surface. It has been proved that a simple and effective method to achieve superhydrophobicity is to prepare micro-nanostructures on solid surfaces. The surface of many plant leaves is very hydrophobic, the most typical is the surface of the lotus leaf, the contact angle between the water droplet and the leaf surface is greater than 150°, and the water droplet is easy to roll off, this super-hydrophobic phenomenon is called the lotus leaf effect . [0003] The surface of superhydrophobic silicon micro-nano composite structure has important application requirements in micro-nano electromechanical systems. In the process of microfabrication, the release of a...

Claims

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Application Information

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IPC IPC(8): B81B7/04B81C1/00B82Y30/00B82Y40/00
Inventor 何洋姜澄宇张峰尹恒许陈俊王圣坤胡培军苑伟政田梦君
Owner NORTHWESTERN POLYTECHNICAL UNIV
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