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Super-hydrophobic silicon micron-nano composite structure and preparation method thereof

A composite structure and super-hydrophobic technology, applied in the direction of microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problem of uncontrollable morphology of silicon micro-nano composite structures, and achieve low-cost effects

Inactive Publication Date: 2014-03-12
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The above method is low in cost, but the morphology of the obtained silicon micro-nano composite structure is uncontrollable

Method used

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  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof
  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof
  • Super-hydrophobic silicon micron-nano composite structure and preparation method thereof

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Embodiment 1

[0032] The super-hydrophobic silicon micro-nano composite structure in this embodiment is: a super-hydrophobic silicon micro-nano composite structure with 100×100 square column array micron structures on the silicon surface, each micron structure having a side length a=20 μm and a height h= 20 μm, the horizontal distance between two adjacent microstructures is b1=40 μm, the vertical distance is b2=80 μm, and there are columnar nanostructures on the surface of each microstructure.

[0033] The method for preparing a silicon superhydrophobic micro-nano composite structure in this embodiment includes the following steps:

[0034] Step 1: Making a reticle: through the reticle design, the size parameters of the array micron structure are a=20μm, b1=40μm, b2=80μm;

[0035] Step 2: Photolithography: Perform photolithography through processes such as glue coating, pre-baking, exposure, development, and post-baking, and copy the mask pattern onto the photoresist on the surface of the silicon ...

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Abstract

The invention discloses a super-hydrophobic silicon micron-nano composite structure and a preparation method thereof, which belong to the nano material preparation field. The structure is a micron-nano composite structure composed of square column array micron structures on the surface of silicon and columnar nano structures on each micron structure. The preparation method is relatively low is cost, can realize the controllable preparation of the periodic array silicon micron-nano composite structure, and is compatible with micro-electronic and micro-electro-mechanical technologies, thereby providing an effective means for the deep research on the influence of geometrical morphology on wettability; and the preparation method omits surface modification, and the super-hydrophobic property can be obtained by simply changing the structural topography of the surface, thereby laying the foundation for the application of the surface of the super-hydrophobic silicon micron-nano composite structure in the field of micro-electro-mechanical systems and the like.

Description

Technical field [0001] The invention relates to a superhydrophobic silicon micro-nano composite structure and a preparation method thereof, and belongs to the field of nano material preparation. Background technique [0002] Generally, a solid surface with a contact angle of water greater than 150° is called a superhydrophobic surface. It has been proven that a simple and effective method to achieve superhydrophobicity is to prepare micro-nano structures on solid surfaces. The surface of many plant leaves is very hydrophobic. The most typical one is the surface of the lotus leaf. The contact angle between the water drop and the leaf surface is greater than 150°, and the water drop is easy to roll off. This super-hydrophobic phenomenon is called the lotus leaf effect. . [0003] The surface of superhydrophobic silicon micro-nano composite structure has important application requirements in micro-nano electromechanical systems. In the process of microfabrication, the release of ad...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/04B81C1/00B82Y30/00B82Y40/00
Inventor 何洋姜澄宇张峰尹恒许陈俊王圣坤胡培军苑伟政田梦君
Owner NORTHWESTERN POLYTECHNICAL UNIV
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