General control kernel system used for integrated circuit manufacturing equipment

Abstract

The invention discloses a general control kernel system used for integrated circuit manufacturing equipment. The system comprises a configuration module, a control module and a monitoring module, wherein the configuration module is used for instantiating objects and registering the instantiated objects into name space when an object system is started, establishing an initial name space structure, and initializing the objects in the initial name space tree structure; the control module is used for controlling a service that a high-level control unit calls and executes a low-level control unit according to the initial name space tree structure established by the configuration module, wherein the controlled objects comprise a physical layer, a functional layer and an operation layer according to the level from low to high and the controlled objects also comprise a maintenance layer which is at the same level as the operation layer; and the monitoring module is used for monitoring conditions of the kernel system and executes corresponding operations independently when the conditions are met. The invention provides a strong application programming interface supporting software interlock, data logging and communication function, and realizes component development and software reuse through a flexible configuration strategy.

Description

technical field [0001] The invention relates to the fields of computer application technology and integrated circuit equipment technology, in particular to a general control core system for integrated circuit manufacturing equipment. Background technique [0002] With the rapid development of microelectronics technology, information technology, network technology, etc., the rapid growth of the global information industry, the rapid rise of the network economy, the beginning of knowledge economy, and the continuous rise of cutting-edge technologies in modern national defense and future wars, human beings have entered the information and Internet Age. Due to the core position of microelectronics technology, microelectronics has shown its important strategic position more than ever before, and the microelectronics industry has become an important pillar of the global economy and a powerful driving force for economic and social development. [0003] As a part of the IC (Integra...

AI Technical Summary

Problems solved by technology

However, the commonality of the core system of the existing integrated circuit is poor, so that the efficiency of the developer's development device control application program is low, and the robustness of the developed application program is poor.

Images