Implementation method for photonic crystal biochemical sensor array capable of realizing parallel perception

Abstract

The invention relates to an implementation method for a photonic crystal biochemical sensor array capable of realizing parallel perception. A photonic crystal biochemical sensor array is implemented on the same two-dimensional photonic crystal flat module for the first time. A two-dimensional photonic crystal-based flat structure is designed, and due to the design of a combination of resonant cavities with different resonant frequencies, high-efficiency coupling between various resonant cavities and a photonic crystal waveguide can be implemented, and the photonic crystal biochemical sensor array is designed. The array has a basic structure of a triangular grid photonic crystal flat structure based on an air hole, and mainly comprises a line defect photonic crystal waveguide (W1 waveguide) and a plurality of resonant cavities with different resonant frequencies. In the scheme, five resonant cavities with different resonant frequencies are adopted, which are named H0-cavity-1, H0-cavity-2, H0-cavity-3, H0-cavity-4 and H0-cavity-5 respectively. Because high-efficiency coupling between the various resonant cavities and the photonic crystal waveguide can be implemented, a light field can be locally distributed in respective area through the various resonant cavities, and the capacity of parallelly sensing small-volume analyzed object is provided.

Description

technical field [0001] The invention relates to a method for realizing a photonic crystal biochemical sensor array capable of realizing parallel sensing, and belongs to the technical field of micro sensors. Background technique [0002] With the maturity and development of optical technology and nanofabrication technology, many microsensors with different structures have been proposed and widely studied. So far, microsensors mainly contain ring resonator sensors (document 1, A.B.Matsko, and V.S.Ilchenko, "Optical resonators with whispering-gallery modes-Part I: Basics," IEEE J.Sel.Top.Quantum Electron. 12, 3, 2006. and literature 2, A.M.Armani, and K.J.Vahala, "Heavy water detection using ultra-high-Q microcavities," Opt. Lett.31, 1896, 2006), whispering gallery mode sensor (document 3, F. Vollmer, D.Braun, A.Libchaber, M.Khoshsima, I.Teraoka, and S.Arnold, "Protein detection by optical shift of a resonant microcavity," Appl.Phys.Lett.80, 4057, 2002 and literature 4, A.M. ...

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Problems solved by technology

With the development of sensing technology and actual application needs, photonic crystal sensor array is the future development trend. However, the current research has not mentioned photonic crystal sensor array. Only Sudeep Mandal and David Erickson proposed a similar method in 2008. Miniature sensor arrays (ref. 13, Sudeep Mandal and David Erickson, "Nanoscale optofluidic sensor arrays", Opt. Express, 16, 1623, 2008)

However, the sensor array mentioned above is composed of many photonic crystals with a single row of holes, and is not implemented on the same photonic crystal flat panel module.

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