Integrated micro electro-mechanical system (MEMS) device and forming method thereof

Abstract

The embodiment of the invention provides an integrated micro electro-mechanical system (MEMS) device and a forming method thereof. The integrated MEMS device comprises a first substrate, at least one layer or multiple layers of conducting layers, a movable sensitive element of an inertial sensor, a second substrate, a third substrate, and a sensitive film or backboard electrode of a microphone, wherein the first substrate comprises a first area and a third area; the at least one layer or multiple layers of the conducting layers are formed on the first surface of the first substrate; the movable sensitive element of the inertial sensor is formed by adopting the first substrate of the first area; the second substrate is combined with the surfaces of the conducting layers on the first substrate; the third substrate is combined with one side of the movable sensitive element of the inertial sensor formed by the first substrate; the third substrate and the second substrate are positioned ontwo opposite sides of the movable sensitive element of the inertial sensor respectively; and the sensitive film or backboard electrode of the microphone at least comprises the first substrate of the third area, or one of the conducting layers on the first substrate of the third area. The integrated MEMS device integrated with a pressure sensor, the inertial sensor and the microphone is small in volume and low in cost, and the reliability after packaging is high.

Description

technical field [0001] The invention relates to the field of semiconductor technology, in particular, the invention relates to an integrated MEMS device and a method for forming the same. Background technique [0002] Since the late 1980s, with the development of micro-electro-mechanical system (Micro-Electro-Mechanical-System, MEMS) technology, various sensors have been miniaturized. [0003] At present, the most widely used sensors mainly include MEMS pressure sensors, MEMS inertial sensors and MEMS microphones. The MEMS pressure sensor is a device for detecting pressure. Current MEMS pressure sensors include silicon piezoresistive pressure sensors and silicon capacitive pressure sensors, both of which are micro-electromechanical sensors produced on silicon chips. MEMS pressure sensors are widely used in automotive electronics such as TPMS (tire pressure monitoring system), consumer electronics such as tire pressure gauges and sphygmomanometers, industrial electronics suc...

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Problems solved by technology

[0006] The problem solved by the present invention is to provide an integrated MEMS device and its forming method, which overcomes the defects of complex process, large volume and high cost in the prior art

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