Active shock absorption and vibration isolation device

Abstract

The invention discloses an active shock absorption and vibration isolation device. In the device, a speed signal of an object which is subjected to vibration isolation is converted into a ceiling damping force signal to act on the object which is subjected to the vibration isolation by the technology of non-linear fractional order ceiling damping control to achieve the vibration isolation effect of the low-vibration transmissibility and high attenuation ratio of the object which is subjected to the vibration isolation; and thus, the robustness of damping control can be improved, and the dynamic characteristic of shock absorption and vibration isolation device can be improved.

Description

technical field [0001] The invention relates to the technical field of active shock absorption and vibration isolation, in particular to an active shock absorption and vibration isolation device. Background technique [0002] In large-scale semiconductor integrated circuit production equipment, such as lithography machines, the vibration interference of many important components such as laser interferometer measurement systems and exposure systems is required to be as small as possible, so that important modules are in a quiet environment. Because the vibration interference will be transmitted to the measurement frame, causing unnecessary movement of the measurement frame, which will interfere with the laser interferometer measurement system of the workpiece stage mask stage and the like. Eventually, it will affect the workpiece stage, mask stage and mirror surface errors, resulting in increased overlay errors and feature line width errors. Therefore, in semiconductor equip...

Images