Hybrid integrated planar waveguide detector chip based on coarse wave decomposing and multiplexing
A detector chip and integrated plane technology, applied in the field of hybrid integrated planar waveguide detector chips, can solve the problems of failure to realize single-fiber transmission and integration, and achieve the effects of easy fabrication, small size and simple materials
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[0028] The product of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments of the present invention.
[0029] Such as figure 1 As shown, the shown 1×4 planar waveguide chip is mainly composed of three parts: input port area 1 , waveguide area 2 and detector array area 3 . The structure of the chip is distributed as follows: input port area 1, located at the input end of the chip, includes a V-shaped groove 4, input optical fiber 5, the input optical fiber 5 is placed in the V-shaped groove 4, and a groove is arranged behind the V-shaped groove 4 6. After the groove 6 is the waveguide area 2. The waveguide region 2 includes an input waveguide 7, three Mach-Zehnder interferometers 9, 13, 14 and 4 output waveguides. A detector array 17 is connected after the four output waveguides, and the detector array 17 is located on a silicon-based platform 18 . The three Mach-Zehnder interferometers are respectively...
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