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make al 2 o 3 Method for ceramic elastomer, measuring membrane for pressure sensor and pressure sensor with such membrane

A pressure sensor, al2o3 technology, applied in the direction of measuring fluid pressure, measuring fluid pressure through electromagnetic components, measuring devices, etc., can solve the problems of complex deformation components and too expensive forming methods

Active Publication Date: 2016-09-21
EHNDRESS KHAUZER GMBKH KO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these forming methods are very complex and too expensive for mass production of deformable elements of pressure sensors

Method used

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  • make al <sub>2</sub> o <sub>3</sub> Method for ceramic elastomer, measuring membrane for pressure sensor and pressure sensor with such membrane
  • make al <sub>2</sub> o <sub>3</sub> Method for ceramic elastomer, measuring membrane for pressure sensor and pressure sensor with such membrane
  • make al <sub>2</sub> o <sub>3</sub> Method for ceramic elastomer, measuring membrane for pressure sensor and pressure sensor with such membrane

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Embodiment Construction

[0052] Alumina having the following properties is used as figure 1 Raw materials for the method shown in:

[0053] - Specific surface area: 13m 2 / g

[0054] - Grain size d at cumulative 50% by mass 50 : 0.13μm

[0055] - Purity: 99.99%.

[0056] MgO is used as dopant in the form of magnesium hydroxycarbonate, which is added in such an amount that the desired proportion of MgO is obtained.

[0057] dispersion

[0058] Convert alumina to pressed pellets. For this purpose, an aqueous slurry is first prepared, which is dispersed in an agitator ball mill. Add 1.6L of distilled water, 500-1000ppm MgO, 0.5-1.5% of plasticizer, 1.5-7% of binder and lubricant to 3.000g of alumina and disperse it in a circulation system for a duration of eg 30min. Then, the slurry was filtered through a 100 μm-sieve.

[0059] spray granulation

[0060] Next, the slurry is sprayed in a spray tower at a tower temperature of 150-250°C. The resulting granular material was filtered through a 315 ...

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Abstract

The invention relates to a method for the production of an elastic deformation body from Al2O3 ceramics, utilizing a highly pure alumina having a maximum of 2000 ppm of MgO1, a maximum of 200 ppm of inorganic contaminants, a specific surface of at least 10 m2 / g, a mean grain size of a maximum of 0.3 µm, wherein a homogeneous mixture is created using the alumina and additives by means of aqueous processing, from which a spray granulate that can be compressed is created, which is formed into a homogeneous green body by means of a uniaxial compressing method, the green body being subjected to a sintering process, wherein the resulting elastic deformation body has a bending rupture stress sc, the distribution F (sc ) of which is given by the Weibull parameters s0 = 800 MPa and m = 24, and has a mean grain size of the sintered material of less than 2 µm, and wherein the sintered material of the deformation body has a density of less than 3.98 g / m2.

Description

technical field [0001] The present invention relates to Al 2 o 3 Production of elastomers made of ceramics, in particular elastically deformable bodies made of this material, in particular measuring membranes, also called measuring diaphragms. Furthermore, the invention relates to such a measuring membrane and to a pressure sensor having such a measuring membrane. Elastically deformable bodies are used in pressure sensors as measuring membranes. Pressure sensors therefore generally comprise a measuring membrane which can come into contact with the pressure to be measured and undergoes a pressure-dependent deformation. The pressure sensor usually also includes a converter with which the deformation of the deformation body and of the measuring membrane is respectively converted into a signal, in particular into an electrical signal. Examples of such converters include capacitive converters, resistive converters and converters with mechanical resonators. An overview of the p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/00C03C10/00C04B35/645
CPCC04B35/111C04B35/62655C04B35/6455C04B2235/3201C04B2235/3206C04B2235/3208C04B2235/3418C04B2235/5216C04B2235/5409C04B2235/5445C04B2235/604C04B2235/608C04B2235/6562C04B2235/6565C04B2235/661C04B2235/72C04B2235/77C04B2235/785C04B2235/786C04B2235/96G01L9/0042G01L9/0075
Inventor 弗兰克·黑格纳安德烈亚斯·罗斯贝格弗兰克·卡斯特纳尔亨利·路德维希乌塔·奥伯巴赫
Owner EHNDRESS KHAUZER GMBKH KO KG