Parallel micro-positioning platform based on driving of piezoelectric ceramic driver and micro-positioning platform system

Abstract

The invention relates to a parallel micro-positioning platform based on the driving of piezoelectric ceramic drivers and a system, which comprises a micropositioner, a baseplate and a control system, wherein the micropositioner comprises a movable platform and four flexible hinges, a single piezoelectric ceramic driver and a pair of side-by-side piezoelectric ceramic drivers are respectively arranged at the two adjacent sides of the movable platform, one end of each piezoelectric ceramic driver and the movable platform are connected through a universal hinge, the other end of each piezoelectric ceramic driver is connected with a pre-tightening spring through the other universal hinge, and the pre-tightening spring is pre-tightened through a bolt; a capacitance sensor is respectively arranged on the upper surface of the movable platform along the axis direction of each piezoelectric ceramic driver; and one capacitance sensor is positioned on a sensor bracket fixed at the outer side of the micropositioner, the other capacitance sensor is positioned on the other sensor bracket fixed on the upper surface of the movable platform, and computer closed-loop control is adopted. Through theparallel micro-positioning platform and system, the displacement straightness accuracy and the positioning precision are effectively improved, coupling is eliminated, driver separation is avoided, and piezoelectric drivers are protected. By adopting an LQG (Linear Quadratic Gaussian) algorithm of an augmented noise model, narrowband foundation disturbance is effectively inhibited, and the positioning precision is improved.

Description

technical field

[0001] The invention relates to a micro-positioning platform technology, in particular to a parallel micro-positioning platform driven by a piezoelectric ceramic driver and a micro-positioning platform system, which can be used in occasions requiring high-precision positioning such as electron microscopy and optical alignment. Background technique

[0002] The micro-positioning platform can be used in occasions that require high-precision positioning, such as electron microscopy, optical alignment, etc., especially for occasions that have high requirements for the straightness of output displacement. In order to reduce displacement output coupling, positioning devices at home and abroad all adopt the form of series connection. Chinese patent CN 2621876Y proposes a symmetrically designed flexible guide rail. However, due to processing and assembly errors, structural asymmetry still exists, and the output displacement Straightness is still not guaranteed. Chin...

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