Three-dimensional solid needle tip flexible micro-electrode array and making method thereof

Abstract

The invention provides a three-dimensional solid needle tip flexible micro-electrode array and a making method thereof. The micro-electrode array comprises a split insulating column array wrapped in an insulating flexible substrate, an electrode and an electricity conducting lead, wherein the head of an insulating column is in a shape of a needle tip and wrapped by the electrode, the needle tip electrode is exposed outside, the electricity conducting lead is paved along the insulating column and the insulating flexible substrate, one end of the electricity conducting lead is connected with the electrode, and the other end is exposed outside. The insulating column is of a solid structure, so that the electrode can be pierced into a stimulation part and effectively provide electric stimulation and record. In order to make the three-dimensional solid needle tip flexible micro-electrode array, silicon materials are treated by a silicon dicing-corrosion process for making the three-dimensional solid needle tip flexible micro-electrode array. The three-dimensional solid needle tip flexible micro-electrode array provided by the invention can be used for nerve electric stimulation and record and can be widely used in the fields of nerve disease treatment, nerve rehabilitation, neurobiology basic research and the like.

Description

technical field [0001] The invention relates to a three-dimensional solid needle-tip flexible microelectrode array and a manufacturing method thereof, in particular to manufacturing a three-dimensional solid needle-tip flexible microelectrode array by using a silicon scribing-etching manufacturing method, and belongs to the technical field of micromachining. Background technique [0002] Human research on neural interfaces has been going on for more than 30 years. Neural interface refers to the direct connection path created between human or animal nerves (or nerve cell cultures) and external equipment, including nerve electrodes and peripheral processing circuit parts, to achieve electrical stimulation and recording of nerves, so as to improve and Analyze electrical activity in the cerebral cortex. Since the mid-1990s there has been a remarkable increase in such knowledge gained from experiments. Based on the practice of animal experiments for many years, the early neural...

AI Technical Summary

Problems solved by technology

This planar electrode can better meet the requirements of biocompatibility and the function of electrical conduction. The disadvantage is that the electrode cannot be effectively attached to the tissue, and the stimulation effect is affected. Because of this, it limits the application of this type of planar electrode to other nerves. Application of interface

However, the flexible substrate array is a hollow needle tip, which cannot penetrate into the tissue, which is the main reason that limits the application of this array to other nerve stimulation and recording.

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