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Air spring vibration isolator based on piston type liquid viscous damping action

A kind of air spring, viscous damping technology, applied in the direction of spring/shock absorber, spring, shock absorber, etc., to achieve the effect of compact and reasonable structure

Active Publication Date: 2012-02-01
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] In order to solve the existing problems of the existing air spring vibration isolator, the present invention proposes an air spring vibration isolator based on the piston type liquid viscous damping effect to meet the needs of ultra-low frequency vibration isolation in the field of ultra-precision measurement, processing, assembly and debugging

Method used

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  • Air spring vibration isolator based on piston type liquid viscous damping action
  • Air spring vibration isolator based on piston type liquid viscous damping action
  • Air spring vibration isolator based on piston type liquid viscous damping action

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Embodiment Construction

[0029] Specific embodiments of the present invention are described in detail below in conjunction with accompanying drawings, as figure 2 , image 3 and Figure 4 As shown, an embodiment of the air spring isolator of the present invention is shown.

[0030] The air spring vibration isolator is equipped with an inner cylinder 6 inside the outer cylinder 7, and the air spring airbag 5 is set outside the upper end of the inner cylinder 6. The outer cylinder 7 is sealed and connected with the lower end of the air spring airbag 5 through its upper end boss, and the inner cylinder 6 passes The annular cover plate 2 affixed to its upper end is sealingly connected with the upper end of the air spring air bag 5 , the air inlet 12 is arranged on the outer wall of the outer cylinder 7 , a group of throttle holes 10 arranged in a circle are arranged on the inner wall of the outer cylinder 7 , and at the lower end of the outer cylinder 7 The circular bottom plate 13 is sealed and fitted...

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Abstract

The invention discloses an air spring vibration isolator based on piston type liquid viscous damping action, and belongs to the field of ultra-precise measurement and processing. The upper end and the lower end of a cable-stayed steel wire rope of the vibration isolator are fixedly connected with an annular cover plate and the lower end of a supporting rod respectively to form a simple pendulum mechanism; a steel spring is arranged at the bottom of an inner cylinder; a piston is contacted and matched with the steel spring; the upper end and the lower end of a flexure hinge are arranged at thelower end of the supporting rod and the upper end face of the piston respectively to form an inverted pendulum mechanism; a spiral damper tube is arranged outside a piston cavity; damping oil is injected into the bottom of the inner cylinder to enclose the spiral damper tube; and one port of the spiral damper tube is communicated with the interior of the piston, and the other end of the spiral damper tube is communicated with the damping oil. The air spring vibration isolator provides damp for a positive-inverted pendulum serial mechanism by using the liquid viscous damping action and the reciprocating motion of the piston, obtains different liquid viscous damping by selecting the damping oil with different viscosities, and can provide the optimal damping under the condition that strong vibration, micro vibration and shock loads exist in the horizontal direction of the vibration isolator.

Description

technical field [0001] The invention belongs to the field of ultra-precision measurement and processing, and in particular relates to an air spring vibration isolator based on a piston type liquid viscous damping effect. Background technique [0002] A vibration isolation device with excellent performance is one of the key technologies for ultra-precision measurement and processing. The air spring vibration isolator has the advantages of good ultra-low frequency vibration isolation performance, high bearing capacity, low equivalent stiffness, natural frequency insensitivity to load changes, easy system implementation, and low energy consumption. With the development of ultra-precision measurement and processing technology With the development of , nanotechnology and VLSI manufacturing technology, air spring isolators have been more and more widely used. Vibration isolation of a measurement frame such as a photolithography machine that carries all exposure elements. [0003...

Claims

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Application Information

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IPC IPC(8): F16F13/00
Inventor 谭久彬夏超王雷闻荣伟杨文国
Owner HARBIN INST OF TECH
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