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Combined pumping system comprising a getter pump and an ion pump

A technology of suction pump and ion pump, applied in the field of combined pumping system, can solve the problems of reduced gas flow and low conductivity, etc.

Active Publication Date: 2012-02-15
SAES GETTERS SPA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] A second class of problems may exist in the projection of dust particles into the beam duct for scientific publications such as "Dust in Accelerator Vacuum Systems" by D.R.C. Kelly in Proceedings of the Particle Accelerator Conference, 1997, Vol. 3, p. 3547 Several applications described in
While this configuration limits the negative effect of ion pump conductivity reduction, it results in reduced gas flow towards the getter pump and is therefore less efficient in conductivity

Method used

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  • Combined pumping system comprising a getter pump and an ion pump
  • Combined pumping system comprising a getter pump and an ion pump
  • Combined pumping system comprising a getter pump and an ion pump

Examples

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example 1

[0046] A combined pumping system according to a preferred embodiment of the present invention has been prepared, comprising a getter pump model CapaciTorr D-100 manufactured by the applicant and an ion pump with a nominal pumping speed of 2 1 / sec. The pumps have been mounted coaxially with respect to each other and are in accordance with ASTMF798-97 at 2.12 10 -8 kg m 2 s -3 has been tested under constant methane flow conditions. The distance between the flange hole and the aspirator has been fixed at 24mm. Table 1 lists the measured partial pressures for methane and hydrogen chemistries, respectively.

example 2

[0047] Example 2 (as a comparison)

[0048] Under experimental conditions similar to the previous examples, a combined pumping system not according to the invention has been prepared, in which the getter pump and the ion pump have been arranged perpendicular to each other. The volume occupied by the getter pump does not intercept the flange bore axis. The distance between the closest getter pump element and the flange hole connected to the ion pump has been fixed at 38mm.

example 3

[0049] Example 3 (as a comparison)

[0050] Under experimental conditions similar to the previous examples, a combined pumping system not according to the invention was prepared, in which the axes of the getter pump and the ion pump were parallel and about 130 mm apart from each other.

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Abstract

A combined pumping system comprising a getter pump (120; 220) and an ion pump (130; 230) is described. The getter pump and the ion pump (120, 130; 220, 230) are mounted in series on a same flange (111; 211) and respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.

Description

technical field [0001] The present invention relates to a combined pumping system comprising a getter pump and an ion pump. Background technique [0002] There are numerous scientific and industrial instruments or systems, such as particle accelerators and electron microscopes, that require ultra-high vacuum conditions (designated UHV in this field) to operate, i.e. pressure values ​​below 10 -6 Pa. Pumping systems are typically used to create these vacuum levels, including pumps defined as primary pumps (eg rotary or diaphragm pumps) and between turbomolecular, getter, ion or cryopumps. Secondary pump of choice. The main pump starts running at atmospheric pressure and is able to reduce the pressure in the chamber to about 10 -1 -10 -2 Pa; at these pressures the UHV pump is activated, reducing the pressure value in the system to about 10 -7 -10 -9 Pa. [0003] Among the most versatile UHV pumps, ion and turbomolecular pumps are capable of absorbing almost any gas. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/02F04B37/14H01J7/18H01J41/12
CPCF04B37/02F04B37/14H01J41/12H01J2209/383H01J2209/267
Inventor A·博努奇A·孔特P·玛尼尼
Owner SAES GETTERS SPA
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