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Combined pumping system comprising a getter pump and an ion pump

A technology of suction pump and ion pump, applied in the field of combined pumping system, can solve the problems of low conductivity and reduced gas flow, etc.

Active Publication Date: 2014-06-04
SAES GETTERS SPA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] A second class of problems may exist in the projection of dust particles into the beam duct for scientific publications such as "Dust in Accelerator Vacuum Systems" by D.R.C. Kelly in Proceedings of the Particle Accelerator Conference, 1997, Vol. 3, p. 3547 Several applications described in
While this configuration limits the negative effect of ion pump conductivity reduction, it results in reduced gas flow towards the getter pump and is therefore less efficient in conductivity

Method used

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  • Combined pumping system comprising a getter pump and an ion pump
  • Combined pumping system comprising a getter pump and an ion pump
  • Combined pumping system comprising a getter pump and an ion pump

Examples

Experimental program
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Effect test

example 1

[0046] A combined pumping system according to a preferred embodiment of the invention was prepared, comprising a getter pump model CapaciTorr D-100 manufactured by the applicant and an ion pump with a nominal pumping speed of 2 l / sec. The pumps have been mounted coaxially with respect to each other and according to ASTM F798-97 standard at 2.12 10 -8 kg m 2 the s -3 have been tested under constant methane flow conditions. The distance between the flange hole and the aspirator has been fixed at 24mm. Table 1 lists the partial pressures measured for the chemical species of methane and hydrogen, respectively.

example 2

[0047] Example 2 (as a comparison)

[0048] Under experimental conditions similar to the previous examples, a combined pumping system not according to the invention was prepared in which the getter pump and the ion pump had been arranged perpendicular to each other. The volume occupied by the getter pump does not intercept the flange bore axis. The distance between the closest getter element and the flange hole to which the ion pump is connected has been fixed at 38mm.

example 3

[0049] Example 3 (as a comparison)

[0050] Under experimental conditions similar to the previous examples, a combined pumping system not according to the invention was prepared in which the axes of the getter pump and the ion pump were parallel and approximately 130 mm apart from each other.

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Abstract

A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.

Description

technical field [0001] The present invention relates to a combined pumping system comprising a getter pump and an ion pump. Background technique [0002] There are numerous scientific and industrial instruments or systems such as particle accelerators and electron microscopes, which require ultra-high vacuum conditions (indicated in this field as UHV) for their operation, i.e. pressure values ​​below 10 -6 Pa. Pumping systems are generally used to create these vacuum levels, including pumps defined as primary pumps (such as rotary pumps or diaphragm pumps), and turbo molecular pumps, getter pumps, ion pumps or cryopumps. Choose between secondary pumps. The main pump starts running at atmospheric pressure and is able to reduce the pressure in the chamber to about 10 -1 -10 -2 Pa; at these pressures the UHV pump is activated, reducing the pressure in the system to approximately 10 -7 -10 -9 Pa. [0003] Among the most versatile UHV pumps, ion pumps and turbomolecular pu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/02F04B37/14H01J7/18H01J41/12
CPCH01J41/12F04B37/02F04B37/14H01J2209/383H01J2209/267
Inventor A·博努奇A·孔特P·玛尼尼
Owner SAES GETTERS SPA