Double-workpiece-platform same-phase rotation exchange method based on parallel connection mechanisms, and device thereof
A technology of double workpiece table and workpiece table, which is applied in the field of double workpiece table rotation and exchange in the same phase, can solve the problems of shortening the balance time, loss of the target of the laser interferometer, and large impact torque, etc. The effect of switching efficiency
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[0022] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:
[0023] Based on the parallel mechanism, the double-workpiece stage rotation exchange method in the same phase is composed of three beats. The first beat is: after the first worktable completes the exposure process and the second workbench completes the pretreatment process, respectively from the exposure work The station and the pretreatment station move to the center of the abutment, and the clamping device of the rotary conversion table electromagnetically absorbs the first workpiece table rotary ring sleeve of the first workpiece table and the second workpiece table rotary ring sleeve of the second workpiece table. At the same time, X Loosen the first workpiece table adapter device of the first workpiece table and the second workpiece table adapter device of the second workpiece table respectively to the gripping mechanism on the first linear motor mov...
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