Transmission structure of radio-frequency signal in semiconductor device and forming method for transmission structure
A technology of radio frequency signal and transmission structure, applied in the fields of semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., can solve the problems of low signal linearity, complex RF signal formation methods, and poor signal quality, To achieve the effect of saving process time
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[0033] As described in the background, the method for forming the transmission structure of the radio frequency signal in the semiconductor device in the prior art is complex, and the formed transmission structure of the radio frequency signal in the semiconductor device has poor linearity of the radio frequency signal received by the receiving end.
[0034] After research, the inventor of the embodiment of the present invention found that please continue to refer to Figure 5 , the prior art uses a silicon-on-insulator substrate as a shielding layer, but since the back substrate 101, the oxide layer 102 and the silicon film 103 in the silicon-on-insulator substrate 100 form a capacitance (not marked), the capacitance will reflect A part of the radio frequency signal, the reflected part of the signal will be absorbed by the metal layer 113 again; and because the capacitance has different reflection degrees for signals of different frequencies, the linear relationship of the rad...
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