Manufacturing method of transmission-type silicon-based liquid crystal display
A technology of silicon-based liquid crystals and manufacturing methods, which is applied in semiconductor/solid-state device manufacturing, instruments, optics, etc., can solve the problems of reflective silicon-based liquid crystal displays, such as large volume, difficulty in meeting miniaturization requirements, and complex structure, and achieve compact structure , high reliability, and simple optical path
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[0026] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0027] like Figure 1-13 shown.
[0028] A method for manufacturing a transmissive liquid crystal on silicon display, which includes: transparent treatment of a silicon-based substrate, manufacturing of a color filter, manufacturing of a liquid crystal sealing box, manufacturing of a high-brightness backlight source, and a common ITO electrode with a black matrix substrate fabrication ( Figure 8 ) and micro-assembly of multilayer discrete components; the transparent treatment of the silicon-based substrate (such as Figure 1-4 ) is an insulating silicon wafer, which is composed of a device layer 1, an insulating layer 2 and a substrate layer 3, such as figure 1 , the thickness of the insulating layer is 0.5~1μm, and the thickness of the device layer is 0.3~1.5μm. When manufacturing, the required silicon-based integrated circuit part and liquid c...
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