Chemical monitoring and warning system and method for monitoring chemical application amount or stock amount using same

A technology for monitoring chemicals and usage, applied in general control systems, control/regulation systems, program control, etc., and can solve problems such as false positives and false negatives, missed alarms, and inability to update early warning thresholds.
CN102436202AActive Publication Date: 2012-05-02SHANGHAI HUALI MICROELECTRONICS CORP
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Patent Information

Authority / Receiving Office
CN Ā· China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI HUALI MICROELECTRONICS CORP
Publication Date
2012-05-02

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Abstract

The invention generally relates to a system used for monitoring a chemical state in the semiconductor industry and an application method of the system, more precisely, the invention aims to provide a chemical monitoring warning system and a method for monitoring chemical application amount or stock amount using the same; prewarning upper and lower limit thresholds and a dynamic stock amount prewarning threshold of chemical dynamic application amount are set according to history data, thereby realizing in-time effective prewarning of abnormal application amount and stock amount. The system andthe method provided by the invention have significant meaning on that the chemical management efficiency of high technology manufacturing such as semiconductor manufacture, liquid crystal panel manufacture, solar manufacture and the like are improved, chemical supply risk is reduced, and product line safe and normal production is ensured.
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Description

technical field

[0001] The present invention generally relates to a system for monitoring the status of chemicals in the semiconductor industry and an application method of the system. More precisely, the present invention aims to provide a chemical monitoring and alarm system and use the system to monitor the amount of chemicals used or inventory method. Background technique

[0002] With the development of the integrated circuit industry, the semiconductor process technology is constantly evolving, the density is getting higher and higher, and the capital investment is increasing. These factors have put forward higher requirements for the trouble-free operation of the plant power system, especially It is required that the coordinated relationship between material allocation and manufacturing departments achieve zero errors. Among them, as an extremely important factory chemical supply system, it is a deployment system that provides uninterrupted chemical supply for the pr...

Claims

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