Computer tomographic workpiece measuring device

Abstract

The invention relates to a computer tomographic workpiece measuring device, comprising an x-ray source (16) designed to generate invasive radiation, detector means (28) designed to detect the invasive radiation, and a workpiece carrier unit (20, 24, 26) which comprises a center and / or rotational axis that is designed such that a workpiece (40) to be measured and carried by said unit can be placed in a beam path (30) of the invasive radiation between the x-ray source and the detector means and can be moved in the beam path, particularly along the center or rotational axis. According to the invention, a ratio of a first smallest distance A between a radiation outlet of the x-ray source (16) and the center or rotational axis (42) of the carrier unit extending in the beam path in relation to a second smallest distance B between the radiation outlet and the detector means comprising a plurality of detector pixels arranged in a two-dimensional manner in an area, which is to say A / B, is > 0.5, preferably > 0.7, more preferred > 0.8, a side and / or edge length ratio of the area of the detector means is in the range between 1.5:1 to 500:1, preferably in a range between 2:1 and 100:1, and the detector pixels have a maximum pixel size smaller than 100 [mu]m, preferably smaller than 80 [mu]m, more preferred smaller than 50 [mu]m.

Description

technical field [0001] The invention relates to a computed tomography workpiece measuring device according to the preamble of the main claim. Background technique [0002] Such devices for non-medical computed tomography are generally known from the prior art and are based on a measurement principle similar to human medical or veterinary computed tomography, with high power X-rays applied as invasive radiation to the workpiece and perspective The workpiece, wherein the workpiece as the object of measurement is typically located on a rotary table as workpiece carrier between the (high-power) x-ray source and the electron x-ray detector. The detector registers the X-rays penetrating the object pixel by pixel by means of suitable detector pixels. By rotating the workpiece to be measured or inspected with this rotary table, a plurality of x-ray images from different directions (perspective) can be obtained, which are combined in a subsequent evaluation unit to form a three-dime...

AI Technical Summary

Problems solved by technology

[0005] However, this conventional approach has the disadvantage that, with this geometry and the always present instability of the X-ray tube, there are movements in the radiation emitted by the X-ray source, which are then manifested on the detector side. for the image is not clear

This results in limited image quality and resolution

The conventional geometry of the components involved, namely the x-ray source, the detector and the carrier unit, also leads to devices known from the prior art typically having a large mechanical construction, with the associated disadvantages of tall housings, shielding and support costs: determined by principle, X-ray tomography equipment requires (lead) shielding of the relevant channels, so that large mechanical dimensions (in particular relative to the workpiece to be inspected) have a significant impact on manufacturing costs, weight and installation conditions (for example for foundation requiring additional mechanical reinforcement) has the adverse effect of

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