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Aqueous detergent composition

A mixture and cleaning liquid technology, applied in detergent composition, non-surface active detergent composition, organic non-surface active detergent composition, etc., can solve the problem of chemical stability and safety, inability to thoroughly clean pollutants, Eliminate problems such as rising process costs and achieve excellent results and excellent washing effects

Active Publication Date: 2012-05-30
DONGWOO FINE CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if a solvent is used for cleaning, the solvent will remain on the substrate and cause adverse conditions
In addition, there are also safety issues such as chemical stability and flammability.
Furthermore, after entering the era of high oil prices, as the price of raw materials rises, the cost of manufacturing processes also rises accordingly.
And with pure water, pollutants cannot be washed thoroughly, which leads to the problem of low production yield
[0005] In addition, cleaning solutions containing alkaline compounds may cause damage to the polyimide (PI) alignment film

Method used

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  • Aqueous detergent composition
  • Aqueous detergent composition
  • Aqueous detergent composition

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～13 and comparative example 1～4

[0033] Examples 1-13 and Comparative Examples 1-4: Preparation of cleaning liquid mixture

[0034] According to the determined content, the ingredients recorded in the following Table 1 were added into a mixing tank equipped with a stirrer, and then stirred at a speed of 500 rpm for 1 hour at room temperature to complete the preparation of the cleaning liquid mixture.

experiment example

[0035] Experimental example: evaluation of detergency and alignment film damage

[0036] 1. Evaluation of cleaning power

[0037] Put 100ml of the cleaning liquid mixture prepared in the above-mentioned Examples 1-13 and Comparative Examples 1-4 into a beaker with a capacity of 250ml, and rub the polyimide alignment film on the substrate (5×5× 0.7cm) and then perform 1 minute ultrasonic (40kHz, 20°C) cleaning. In this way, the substrate taken out after the cleaning operation for a certain period of time was rinsed with ultrapure water for 30 seconds. Next, nitrogen was used to remove the liquid on the surface of the substrate, and then, it was placed in an oven and dried at 170° C. for 5 minutes. Finally, the substrate was inspected using a scanning electron microscope (SEM: Hitachi, model S-4700), and then the detergency was judged by the number of foreign particles remaining on the surface of the substrate. The comparison results are as follows in Table 1. figure 1 a...

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Abstract

An aqueous detergent composition is provided to ensure excellent cleaning effect to contaminant existing on an alignment layer substrate due to excellent moisture penetration effect. An aqueous detergent composition does not contain an alkali compound and contains C1-C5 lower alcohol, a water soluble glycol ether compound, organophosphate and water. Based on the total weight of the composition, 0.1 weight% -15 weight% of C1-C5 lower alcohol, 0.1 weight% -15 weight% of water soluble glycol ether compound, 0.01 weight% -10 weight% of organophosphate, and the balance of water.

Description

technical field [0001] The present invention relates to an aqueous cleaning liquid mixture used for semiconductors, display devices and the like. To be more specific, it is a substrate water-based cleaning liquid mixture used before and after rubbing of liquid crystal alignment films during the liquid crystal cell manufacturing process of liquid crystal display devices. Background technique [0002] Generally speaking, in the liquid crystal cell manufacturing process, in order to allow the two patterned substrates with electrode patterns to have the functions of alignment film and insulating film, first coat polyimide (polyimide), and then apply it to a certain Direction rubbing process to form an alignment film. Afterwards, in order to form the container of the liquid crystal cell and control the thickness of the liquid crystal cell, a spacer and a seal adhesive are placed between the two substrates, so that the two substrates are bonded to each other. At this time, if th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C11D7/36C11D7/26
CPCC11D7/36C11D7/5022C11D7/263C11D7/261
Inventor 尹嚆重金圣植房淳洪金炳默
Owner DONGWOO FINE CHEM CO LTD