Critical method for manufacturing fiber array by semiconductor technology

Abstract

The invention discloses a critical method for manufacturing a fiber array by a semiconductor technology. The method comprises the following steps of: plating a protective layer on a base plate; coating optical resist on the protective layer; exposing the optical resist; developing to remove a light-transmittable part in the optical resist; removing the part, which is not covered by the optical resist, in the protective layer; etching a U-shaped groove on the base plate by a dry etching technology; removing the protective layer remained on the base plate to get a fiber array location base plate; arranging fibers on the fiber array location base plate to form a fiber ribbon, and packaging the fiber ribbon to get the fiber array. By the dry etching technology, the high-precision U-shaped groove can be etched, and the fibers are located by the U-shaped groove, so that location precision of the fibers is improved, mean error of displacement is reduced greatly, and precision of the manufactured fiber array reaches 0.1 micrometer, thus, loss of optical signals is reduced, and the uniformity of the optical signals is improved.

Description

【Technical field】 [0001] The invention relates to the technical field of optical fiber arrays, in particular to a key method for manufacturing optical fiber arrays using semiconductor technology. 【Background technique】 [0002] With the recovery of the optical communication industry, the market for optical splitters is also booming. Plan Lightwave Circuit (PLC optical splitter) is a research hotspot at home and abroad today, and has a good application prospect. The PLC optical splitter is mainly used in the passive optical network of the access network to connect the central office with multiple users and realize fiber-to-the-home. The optical fiber array is the core component of the PLC optical splitter. The output end of the PLC optical splitter uses the optical fiber ribbon of the optical fiber array to couple with each output optical waveguide in the PLC. Therefore, the arrangement of the fiber ribbons of the fiber array directly affects the accuracy of the PLC optical...

AI Technical Summary

Problems solved by technology

It is very difficult to manufacture fiber arrays with small spacing by using the drilling method, and the problem of angular divergence is difficult to eliminate, and the accuracy of the fiber array is low; the cumulative string length error of the close arrangement method is relatively large, generally up to 5.0 microns, and the accuracy of the fiber array is low; The V-shaped groove positioning method can only make multi-channel V-shaped grooves with a maximum accuracy of 1.0 microns, which still cannot meet the actual needs.

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