Method for increasing maintaining voltage of electrostatic protective device

Abstract

The invention discloses a method for increasing maintaining voltage of an electrostatic protective device. The method comprises the following steps of: first, making a controlled silicon device with a parasitic PNPN, PNPNP or NPNPN structure on a semiconductor substrate; and then embedding a semiconductor element into a controlled silicon device parasitic transistor feedback path, wherein the semiconductor element is used for inhibiting positive feedback of the controlled silicon and increasing the maintaining voltage of the controlled silicon when the controlled silicon is used as the electrostatic protective device. By using the method for increasing the maintaining voltage of the electrostatic protective device, the controlled silicon device with the parasitic PNPN, PNPNP or NPNPN structure is made on the semiconductor substrate and the semiconductor element capable of inhibiting the positive feedback of the controlled silicon, like a diode, a diode string, a transistor, an MOS (Metal Oxide Semiconductor) tube or the like, is embedded into the controlled silicon device parasitic transistor feedback path so that the positive feedback of the controlled silicon is inhibited and the maintaining voltage of the controlled silicon when the controlled silicon is used as the electrostatic protective device is increased.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a method for increasing the sustain voltage of an electrostatic protection device. Background technique [0002] Static electricity exists all the time in nature. When the external environment of the chip or the static charge accumulated inside the chip flows into or out of the chip through the pins of the chip, the instantaneous current (peak value can reach several amperes) or voltage will damage the integrated circuit. circuit, making the chip function invalid. Throughout the entire life cycle of an integrated circuit (IC), from manufacturing, packaging, transportation, assembly, and even in the finished IC product, it is always facing the impact of electrostatic discharge (ESD). ESD protection is costly to both electronics manufacturers and consumers. When the human body can feel the presence of static electricity, the static electricity generated has reached tens...

AI Technical Summary

Problems solved by technology

Due to its own positive feedback characteristics, thyristor devices have excellent electrostatic protection performance when used in the field of electrostatic protection, but for the same reason, their maintenance voltage is limited within 1-2V and it is difficult to increase

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