Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology

An aerostatic bearing, a large-scale technology, applied in the field of precision measurement, can solve the problems of inability to meet the requirements of high precision, high resolution and high load-bearing stiffness, high quality requirements for lubricating oil, complex workbench structure, etc., to achieve rigidity Good, functional, easy-to-maintain results

Active Publication Date: 2012-07-25
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the hydrostatic workbench, both the static pressure and the spindle need to use high-quality lubricating oil as the rigid bearing medium. The static pressure of the workbench generates high heat, which affects the working life, and the structure of the workbench itself is complex, requiring special The oil supply system has high requirements on the quality of lubricating oil and is difficult to maintain
[0004] None of the above methods can meet the requirements of high precision, high resolution, frictionless, easy to drive, and high load-bearing rigidity in the precision measurement of optical and geometric quantities.

Method used

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  • Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology
  • Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology
  • Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology

Examples

Experimental program
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Effect test

Embodiment 1

[0032] A large-scale high-precision tilting and centering device based on aerostatic bearing technology of the present invention includes a tilting platform 2, a tilting platform seat 4, a centering platform 5, an X-direction micro-displacement generator 6, a Y-direction micro-displacement Displacement generator 3, Z direction micro-displacement generator 9, X direction guide device 16, Y direction guide device 17, several return springs 18; Figure 5 , Image 6 shown.

[0033] The tilting platform 2 and the tilting platform seat 4 form a tilting unit; the tilting platform seat 4 and the centering platform 5 form a centering unit.

[0034] A large-scale high-precision tilting and centering device based on the aerostatic bearing technology of the present invention is placed on a precision rotary table.

[0035] In the tilting functional unit, the upper surface of the tilting platform seat 4 is set as a concave spherical surface with an appropriate radian, and several tilting ...

Embodiment 2

[0041] A large-scale high-precision tilting and centering device based on aerostatic bearing technology of the present invention includes a tilting platform 2, a tilting platform seat 4, a centering platform 5, an X-direction micro-displacement generator 6, a Y-direction micro-displacement Displacement generator 3, Z direction micro-displacement generator 9, X direction guide device 16, Y direction guide device 17, several return springs 18; Figure 7 , Figure 8 shown.

[0042] The tilting platform 2 and the tilting platform seat 4 form a tilting unit; the tilting platform seat 4 and the centering platform 5 form a centering unit.

[0043] A large-scale high-precision tilting and centering device based on the aerostatic bearing technology of the present invention is placed on a precision rotary table.

[0044] In the tilting functional unit, the upper surface of the tilting platform base 4 is set as a concave cylindrical surface with an appropriate curvature radius, while t...

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Abstract

The invention concretely relates to a wide-range tilt-adjusting and aligning workbench based on an aerostatic bearing technology, which belongs to the field of technology of precision measurement. The wide-range tilt-adjusting and aligning workbench based on the aerostatic bearing technology comprises a tilt-adjusting platform, a tilt-adjusting platform seat, an aligning platform, an X-direction micrometric displacement generator, a Y-direction micrometric displacement generator, Z-direction micrometric displacement generators, X-direction guiding devices, Y-direction guiding devices and a plurality of return springs; wherein the connection relation is that: the tilt-adjusting platform seat is placed on the aligning platform, and the tilt-adjusting platform seat and the aligning platform are tightly bonded when low pressure air is not connected; and the tilt-adjusting platform is placed on the tilt-adjusting platform seat, a lower surface of the tilt-adjusting platform and an upper surface of the tilt-adjusting platform seat are surfaces with complementary section shapes, and the tilt-adjusting platform and the tilt-adjusting platform seat are tightly bonded when low pressure air is not connected. The wide-range tilt-adjusting and aligning workbench based on the aerostatic bearing technology can be used for enlarging aligning and tilt-adjusting range and improving aligning and tilt-adjusting accuracy, and requirements of high-accuracy measurement on geometrical parameters and optical parameters of a measured piece are met.

Description

technical field [0001] The invention specifically relates to a large-scale tilting and centering workbench based on aerostatic bearing technology, which belongs to the technical field of precision measurement. Background technique [0002] The tilting and centering workbench is an important device in the field of precision measurement. This kind of workbench needs to meet the requirements of high adjustment accuracy, large range, heavy load, and good load rigidity. It is widely used on precision rotary worktables for tilting and eccentricity of the measured parts and other precise adjustments. [0003] The existing tilting and centering workbench generally adopts rolling elements or hydrostatic technology as the bearing bearing. Rolling element bearings are not only difficult to manufacture and expensive, but also difficult to guarantee machining accuracy, and crawling is prone to occur at low speeds. Therefore, the inclination and centering accuracy of the adjustment work...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D11/00
Inventor 赵维谦侯茂盛邱丽荣王帆
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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