Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology

Abstract

The invention concretely relates to a wide-range tilt-adjusting and aligning workbench based on an aerostatic bearing technology, which belongs to the field of technology of precision measurement. The wide-range tilt-adjusting and aligning workbench based on the aerostatic bearing technology comprises a tilt-adjusting platform, a tilt-adjusting platform seat, an aligning platform, an X-direction micrometric displacement generator, a Y-direction micrometric displacement generator, Z-direction micrometric displacement generators, X-direction guiding devices, Y-direction guiding devices and a plurality of return springs; wherein the connection relation is that: the tilt-adjusting platform seat is placed on the aligning platform, and the tilt-adjusting platform seat and the aligning platform are tightly bonded when low pressure air is not connected; and the tilt-adjusting platform is placed on the tilt-adjusting platform seat, a lower surface of the tilt-adjusting platform and an upper surface of the tilt-adjusting platform seat are surfaces with complementary section shapes, and the tilt-adjusting platform and the tilt-adjusting platform seat are tightly bonded when low pressure air is not connected. The wide-range tilt-adjusting and aligning workbench based on the aerostatic bearing technology can be used for enlarging aligning and tilt-adjusting range and improving aligning and tilt-adjusting accuracy, and requirements of high-accuracy measurement on geometrical parameters and optical parameters of a measured piece are met.

Description

technical field [0001] The invention specifically relates to a large-scale tilting and centering workbench based on aerostatic bearing technology, which belongs to the technical field of precision measurement. Background technique [0002] The tilting and centering workbench is an important device in the field of precision measurement. This kind of workbench needs to meet the requirements of high adjustment accuracy, large range, heavy load, and good load rigidity. It is widely used on precision rotary worktables for tilting and eccentricity of the measured parts and other precise adjustments. [0003] The existing tilting and centering workbench generally adopts rolling elements or hydrostatic technology as the bearing bearing. Rolling element bearings are not only difficult to manufacture and expensive, but also difficult to guarantee machining accuracy, and crawling is prone to occur at low speeds. Therefore, the inclination and centering accuracy of the adjustment work...

AI Technical Summary

Problems solved by technology

In the hydrostatic workbench, both the static pressure and the spindle need to use high-quality lubricating oil as the rigid bearing medium. The static pressure of the workbench generates high heat, which affects the working life, and the structure of the workbench itself is complex, requiring special The oil supply system has high requirements on the quality of lubricating oil and is difficult to maintain

[0004] None of the above methods can meet the requirements of high precision, high resolution, frictionless, easy to drive, and high load-bearing rigidity in the precision measurement of optical and geometric quantities.

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