Focal length measurement method for micro-lens array

A technology of microlens array and lens array, which is applied in the field of optical detection, can solve the problems of low detection accuracy of short focal length microlens array, and achieve the effects of easy operation, wide application range and improved detection efficiency

Inactive Publication Date: 2012-07-25
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

This method can complete the focal length detection of multiple subunits in one detection, and has high measurement efficiency; but it is only suitable for the detection of microlens arrays with long focal lengths, and the detection accuracy of microlens arrays with short focal lengths is low

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  • Focal length measurement method for micro-lens array
  • Focal length measurement method for micro-lens array
  • Focal length measurement method for micro-lens array

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Embodiment Construction

[0036] The present invention will be further described in conjunction with accompanying drawing: figure 1 It is a schematic diagram of the core technology of the present invention, that is, the subdivision principle of the spherical wave front by the Hartmann-Shack wave front sensor. Compared with the plane wave wavefront, when the spherical wave wavefront irradiates the microlens array, the light spots of each subunit of the microlens array are offset in the vertical axis direction (except the central subunit). According to the principle of wavefront subdivision, each subunit The subdivided spherical wave front can be regarded as an oblique incident plane wave front, and the normal direction of the plane wave wave front is determined by the center of the subunit and the converging center of the spherical wave wave front; at the same time, according to the principle of geometric optics imaging, the The center, the sub-unit imaging spot for the subdivided wave surface and the c...

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Abstract

The invention relates to a focal length measurement method for a micro-lens array. All sub-units of the micro-lens array are used for dividing the front parts of spherical surface waves and are imaged on respective focal surfaces; the imaging principle is analyzed, and normal directions of all divided wave surfaces pass through the centers of all sub-hole diameters, the centers of light spots on the focal surfaces and the converging centers of the front parts of the spherical surface waves; and the offsets of the centers of the light spots of all the sub-units of the micro-lens array with an optical axis can be measured through determining the converging centers of the front parts of the spherical surface waves, so as to complete the measurement for the focal lengths of the all the sub-units. According to the method, the measurement for the focal lengths of a plurality of sub-units can be completed through one-time image acquisition and treatment, so that the measurement efficiency and the measurement accuracy are higher, and the method can be used for detecting the micro-lens array with more arrays.

Description

technical field [0001] The invention relates to a method for detecting the focal length of a microlens array, which belongs to the technical field of optical detection and can be used for detecting the focal length of a microlens array with a large number of units. Background technique [0002] The sign of the rapid development of micro-optics is the appearance of micro-array optical elements. As an important component of array diffractive optics, microlens arrays are widely used in wavefront detection, optical coupling, and optical storage because of their advantages such as high diffraction efficiency, wide operating band, miniaturization, and integration. As the core parameter of the microlens array, the focal length directly affects the use and detection accuracy of the microlens array optical system. [0003] For the detection of the focal length of the microlens array, the traditional measurement methods mainly include theoretical detection calculation method, light i...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 朱咸昌伍凡曹学东吴时彬
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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