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Composite control method for piezoelectric ceramic positioning

A piezoelectric ceramics, composite control technology, applied in the direction of adaptive control, general control system, control/regulation system, etc., can solve the problems of sensitive model parameters, difficult to determine, large amount of calculation, etc., to achieve strong adaptability and enhanced stability The effect of sex, fast response speed

Inactive Publication Date: 2012-08-01
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

However, the common disadvantages of these models are that the model is complex, the parameters are many and difficult to determine, the model is sensitive to parameters, and the amount of calculation is large.

Method used

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  • Composite control method for piezoelectric ceramic positioning
  • Composite control method for piezoelectric ceramic positioning
  • Composite control method for piezoelectric ceramic positioning

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Embodiment Construction

[0020] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0021] refer to figure 1 The entire closed-loop control flow chart of a composite control method for piezoelectric ceramic positioning is shown.

[0022] Step (1) Obtain the displacement deviation e(kT) of the piezoelectric ceramic, firstly, the ideal displacement X of the piezoelectric ceramic is given i (kT), the actual displacement of piezoelectric ceramics X (kT) is the displacement of the closed-loop system feedback, compared with the given displacement X i (kT) and the actual displacement X(kT), so as to obtain the displacement deviation e(kT);

[0023] Step (2) sets a threshold δ, which can be achieved by sampling multiple sets of data and then selecting a critical value;

[0024] Step (3) When δ|e(kT)|, the combination of PID and feedforward control is selected to ensure the control accuracy;

[0025] Step (4) After the composite ...

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Abstract

The invention provides a composite control method for piezoelectric ceramic positioning. In the method, different control combination ways are adopted in an entire process; a threshold value delta is set; composite control of feedback control and PID (Proportion Integration Differentiation) control, or composite control of feedback control and PD (Proportion Differentiation) control is used selectively according to the magnitude relation between a displacement deviation e (kT) and the threshold value delta. According to the method, a mathematical model is required to be established, the lag and nonlinearity of a piezoelectric ceramic driver are described by adopting the conventional Preisach model, and the parameter of PID or PD is self-tuned on line by using fuzzy control, so that optimal control of a system can be realized, and the system has the advantages of flexibility, high adaptability and the like of fuzzy control. In the method, a selective control method combination is used for the first time, so that the positioning accuracy of piezoelectric ceramic is increased effectively, the stability and interference resistance are enhanced, the response rise time is shortened, and lag and creepage are eliminated effectively simultaneously.

Description

technical field [0001] The invention belongs to the technical field of nano-positioning in micro-engineering, in particular to a composite control method for piezoelectric ceramic positioning. Background technique [0002] Due to the rapid development of precision engineering and micro-engineering, nanoscale positioning technology has become a key technology in disciplines such as micro-electromechanical systems, ultra-precision machining, microelectronics technology, optoelectronic engineering, and biotechnology. The positioning system based on piezoelectric ceramics has become a research hotspot at home and abroad. Piezoelectric ceramics have a positive piezoelectric effect and an inverse piezoelectric effect. The positioning technology of piezoelectric ceramics is to generate an inverse piezoelectric effect under the action of an electric field, convert the voltage signal into a displacement, and then send it to the computer through a feedback system. Real-time positioni...

Claims

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Application Information

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IPC IPC(8): G05B13/04
Inventor 胡博唐小萍胡松严伟胡志成
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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