Circuit system of micro-electromechanical hybrid gyroscope based on FPGA
A technology of closed-loop detection and circuit system, which is applied in gyro effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc. It can solve problems such as noise and temperature drift, poor flexibility, and complex structure of peripheral signal processing circuits of silicon micro gyroscopes.
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[0068] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand various aspects of the present invention Modifications in equivalent forms all fall within the scope defined by the appended claims of this application.
[0069] like figure 1 As shown, the capacitance change of the detection capacitor plate is converted into a digital signal by differential amplifier 1A, differential amplifier 1B, band-pass filter and analog-to-digital converter (A / D), and then enters FPGA for processing. The digital signal after A / D conversion first passes through LMSD demodulator 2A, LMSD demodulator 2B, after passing through low-pass filter 3A, low-pass filter 3B, get the amplitude signal of the voltag...
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