Device and method for installing and detaching large mirror for ion beam polisher for large-caliber optical parts

Abstract

The invention discloses a device for installing and detaching a large mirror for an ion beam polisher for large-caliber optical parts. The device comprises a bearing device, a turning device for transporting measured workpieces and enabling workpiece faces to be machined to be kept downward in the transportation process and a conveying device for carrying the workpieces transported by the turning device and conveying the workpieces to an ion beam polishing vacuum chamber of the polisher. The bearing device comprises a guide trail and an inner frame arranged in the ion beam polishing vacuum chamber and used for carrying the workpieces conveyed by the conveying device. The conveying device is arranged on the guide rail and moves along the guide rail. The device is simple in structure, convenient to operate and control and capable of guaranteeing cleanness of working environment of the ion beam polisher, improves machining precision and machining efficiency of the ion beam polisher, and prolongs the service life of the device. The invention further discloses a method for installing and detaching the large mirror for the ion beam polisher for the large-caliber optical parts.

Description

technical field [0001] The invention relates to ion beam polishing technology, in particular to a large mirror loading and unloading device and method for an ion beam polishing machine for large-diameter optical parts. Background technique [0002] The ion beam polishing method is a unique and effective processing method in optical mirror processing. Since the physical mechanism of material removal by ion beam polishing is the atomic sputtering effect, the amount of material removal during ion beam polishing can be controlled to the atomic level, and the polishing precision is very high; because the removal function in ion beam polishing is stable and not easy to change, Therefore, ion beam polishing has high certainty and fast surface shape convergence; because ion beam polishing is a non-contact polishing method, there is no contact stress and strain, and the removal function does not change when processing the edge of the workpiece, and there is no edge effect. [0003] ...

AI Technical Summary

Problems solved by technology

[0005] At present, the mass and volume of large-caliber optical parts used in large-scale ion beam polishing machines are large, and it is difficult to rely on manual clamping. Therefore, large-scale ion beam polishing machines must be designed with a set of optical parts delivery system to replace the traditional manual Complete the transportation and clamping of optical parts

[0006] Due to the working characteristics of ion beam polishing, ion beam polishing must establish a vacuum environment. Therefore, the transportation of optical parts inside and outside the vacuum chamber depends on the realization of the docking function of the guide rail. The traditional rolling guide rail docking method requires high installation accuracy of the guide rail. Since the positioning reference of the external rolling guide is the ground, and the positioning reference of the internal rolling guide is the bottom plate of the vacuum chamber (the machining accuracy of the vacuum chamber cannot guarantee that the internal rolling guide is based on the ground), the two references cannot be unified, so it is difficult to ensure that the internal and external The docking accuracy of the rolling guide meets the requirements

[0007] The optical parts delivery system of large-scale ion beam polishing machines used for polishing large-caliber optical parts in foreign countries usually uses a crane to lift the optical parts into the delivery device. However, ion beam polishing requires high environmental cleanliness, and the crane will pollute the environment , and the efficiency of this delivery method is very low, the requirements for manual operation are high, and the operability and delivery efficiency of the ion beam polishing machine are poor

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