Vanadium dioxide-based composite film with adjustable radiance as well as preparation method and application thereof

A technology of vanadium dioxide and composite film, applied in the field of vanadium dioxide-based composite film and its preparation, can solve the problems of weakening visible light transmittance, increasing reflection and absorption, etc., achieving excellent thermochromic performance, improving thermal insulation performance, low radiation effect

Inactive Publication Date: 2012-10-31
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the metal thin film used to reduce emissivity will increase reflection and absorption and

Method used

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  • Vanadium dioxide-based composite film with adjustable radiance as well as preparation method and application thereof
  • Vanadium dioxide-based composite film with adjustable radiance as well as preparation method and application thereof
  • Vanadium dioxide-based composite film with adjustable radiance as well as preparation method and application thereof

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Experimental program
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Effect test

Embodiment 1

[0046] A quartz substrate deposited with a 100nm-thick vanadium dioxide film is placed in a sputtering chamber, vacuumed to less than 0.5 Pa, and an aluminum-doped oxide with a weight percentage of 99.5% aluminum: zinc molar ratio of 2:98 The zinc material is used as the target material, and high-purity argon is used as the working atmosphere. Argon is injected into the sputtering chamber at a flow rate of 10 sccm and the air pressure is kept below 1.0 Pa. The sputtering power is set at 180W, and the sputtering is performed for 20 minutes to obtain (AZO ) A composite thin film based on vanadium dioxide thin film, wherein the thickness of the transparent conductive film is 400nm.

Embodiment 2

[0048] (ATO) composite films based on vanadium dioxide films can also be prepared by a similar method: a quartz substrate deposited with a 20nm thick vanadium dioxide film is placed in a sputtering chamber, and the vacuum is lower than 4.0 Pa, and the content in weight percent 99%, antimony: tin molar ratio of 7:93 antimony-doped tin dioxide material is used as the target material, the working atmosphere adopts high-purity argon gas, and the argon gas is injected into the sputtering chamber at a flow rate of 40 sccm and the pressure is kept below 8.0 Pa, the sputtering power was set at 30W, and the sputtering time was 120 minutes to obtain a composite film based on (ATO) vanadium dioxide film, in which the thickness of the transparent conductive film was 340nm.

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Abstract

The invention relates to a vanadium dioxide-based composite film with adjustable radiance as well as a preparation method and the application thereof. The vanadium dioxide-based composite film with adjustable radiance comprises a vanadium dioxide film layer and a transparent conductive film layer, wherein, the transparent conductive film layer is composited to the vanadium dioxide film layer and can reduce the radiance of the vanadium dioxide-based composite film; and the radiance of the vanadium dioxide-based composite film is below 0.70. The vanadium dioxide-based composite film integrates the advantages of thermochromic intelligent energy-saving glass and low-emissivity glass, also has higher visible light transmittance, and improves the thermal insulation performance of vanadium dioxide-based intelligent energy-saving glass.

Description

technical field [0001] The invention relates to the field of inorganic materials and energy-saving materials, in particular to a vanadium dioxide-based composite thin film with adjustable emissivity and a preparation method and application thereof. Background technique [0002] With the progress of urbanization and urban construction in my country, building energy consumption has increased rapidly. According to statistics, my country's building energy consumption has accounted for 30% of the total energy consumption of all kinds of society. Under the situation of energy shortage in the world, building energy conservation has become a major issue of common concern to all countries in the world. Building energy consumption bears the brunt of building glass energy consumption, especially for modern buildings with large glass areas. For example, when the glass area accounts for 15% of the building area, the heat loss through ordinary glass can be as high as 70%. Therefore, the ...

Claims

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Application Information

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IPC IPC(8): C03C17/34
Inventor 高彦峰康利涛罗宏杰金平实
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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