Fluorescence response follow-up pinhole microscopic confocal measuring device

Abstract

The invention discloses a fluorescence response follow-up pinhole microscopic confocal measuring device and belongs to an optical micro measurement technology. A collimating beam expander, a first beam splitter and a second beam splitter are configured on a direct light path of a pulse laser; an optical power meter is arranged on the reflecting light path of the first beam splitter; a focusing object lens and a three-dimensional micro displacement objective table are arranged on a reflecting light path of the second beam splitter; a long-focus cemented doublet lens and a dichroscope are arranged on a transmitting light path of the second beam splitter; a two-photon fluorescence excitation reflector is arranged on the transmitting light path of the second beam splitter; and a narrow-band filter, a collecting objective lens and a high-gain photoelectric detector are arranged on a reflecting light path of the dichroscope. The device is provided with a pinhole which can adaptively adjust the degree of freedom, the problems of pinhole drift and scanning light spot drift in the measuring process are solved, and the device has the characteristics of high stray light suppression capacity, sensitive response and high accuracy.

Description

technical field

[0001] The invention belongs to optical microscopic measurement technology, and mainly relates to an ultra-precise measuring instrument for three-dimensional microstructure, microstep, microgroove line width, depth and surface shape measurement in microstructured optical elements, microstructured mechanical elements, and integrated circuit elements. Non-contact measuring device. Background technique

[0002] Confocal scanning measurement is one of the important technical means to measure three-dimensional microstructure, micro-step, micro-groove line width, depth and surface shape in the fields of micro-optics, micro-mechanics and micro-electronics. Its concept was first proposed by M.Minsky in 1957 and applied for a patent in 1961. The original intention of M.Minsky's design is to use point illumination and add a pinhole in front of the detector to suppress the stray light generated by ordinary optical microscopes when detecting samples. In the late 1970s,...

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