Electrothermal drive-based stepping micro-rotation device

An electrothermal drive, micro-rotation technology, applied in the direction of electromechanical devices, electrical components, etc., can solve the problems of difficult to reach directly, the conversion structure is not suitable for the motion conversion of micro-displacement actuators, etc., and achieves easy control, simple structure, and high output efficiency. Effect
CN102769371AInactive Publication Date: 2012-11-07SHANGHAI UNIV
6 Cites 2 Cited by

Patent Information

Authority / Receiving Office
CN ยท China
Current Assignee / Owner
SHANGHAI UNIV
Publication Date
2012-11-07
Estimated Expiration
Not applicable ยท inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention relates to an electrothermal drive-based stepping micro-rotation device, which is used for converting reciprocating linear motion of an electrothermal actuator into rotary gear motion. The device consists of a driving actuator, a meshing control actuator, a rack and a gear. The whole device is made of a polycrystalline silicon material, is manufactured by a micro-electromechanical system (MEMS) surface silicon process and is not required to be assembled. The device converts the reciprocating linear motion of the actuator into rotary gear motion, is simple in structure and high in output efficiency and can be applied to MEMS devices such as micro grippers, micro operating tables and micro motors with the rack.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to micro-actuators in the technical field of micro-electro-mechanical systems, in particular to a stepping and micro-rotating device based on electrothermal drive, which is used to convert the reciprocating linear motion generated by the electrothermal actuator into the rotational motion of gears. Background technique

[0002] The actuator is the executive part of MEMS, which undertakes important functions such as energy conversion and motion transmission. According to the energy source, it is divided into electrical energy, chemical energy, fluid energy and thermal energy actuation methods. Electric actuators use electric charge force, magnetic field force, etc. to generate actuation, with fast response speed and low power consumption, but small output displacement and high voltage required, such as piezoelectric, electromagnetic and electrostatic. Due to its low power consumption, high operating frequency, high designability and...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More