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Electrothermal drive-based stepping micro-rotation device

An electrothermal drive, micro-rotation technology, applied in the direction of electromechanical devices, electrical components, etc., can solve the problems of difficult to reach directly, the conversion structure is not suitable for the motion conversion of micro-displacement actuators, etc., and achieves easy control, simple structure, and high output efficiency. Effect

Inactive Publication Date: 2012-11-07
SHANGHAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In Bent-Beam Electrothermal Actuators-Part II: Linear and Rotary Microengines (Journal of Microelectromechanical Systems, Vol. 10, NO. 2, June 2001), Jae-Sung Park et al. introduced an electrothermal actuator through a push-pull structure The generated reciprocating linear motion is transformed into the rotation of the gear. This structure can only realize the push-pull motion when the displacement of the actuator is relatively large. As stated in the text, the output displacement of the actuator is required to be 34 , and the output displacement of the general electrothermal actuator is difficult to directly reach this value, so the conversion structure is not suitable for the motion conversion of the small displacement actuator

Method used

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Experimental program
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Effect test

Embodiment 1

[0021] see figure 1 and figure 2 , the stepping and micro-rotating device driven by electric heat, including a driving part and a conversion transmission part, is characterized in that:

[0022] 1) The driving part includes two main actuators (1a, 1b and 1d, 1c) arranged horizontally on the left and right sides and one engagement control actuator (2b, 2a) on the left and right sides respectively , the four main actuators (1a, 1b and 1d, 1c) on the left and right sides are respectively composed of six V-shaped electrothermal silicon microactuators in series, and the ends are respectively connected to two negative electrodes (9a, 9b) and four positive electrodes (10a, 10b and 10c, 10d); the two meshing control actuators (2b, 2a) on the left and right sides are respectively composed of three V-shaped electrothermal silicon microactuators in series, and the ends Connect two negative electrodes (7b, 7a) and two positive electrodes (8b, 8a) respectively;

[0023] 2) The conversi...

Embodiment 2

[0025] see image 3 , the level of this embodiment is the same as that of Embodiment 1, and the special feature is that: the driving part and the conversion transmission part are prepared on the nitride layer of the silicon substrate, there is a fixed structure layer Poly0 on the nitride layer, and there is a fixed structure layer Poly0 on the Poly0 The structural layer Poly2 constitutes the gear shaft (5), the active structural layer Poly1 on Poly0 constitutes the gear (4), the two racks (6, 3) and the meshing control actuators (2b, 2a).

Embodiment 3

[0027] In the switching device, the rack 3 meshes with the gear 4 in the initial state, the electrodes 7 and 8 supply power to the meshing control actuator 2 , and the electrodes 9 and 10 supply power to the active actuator 1 .

[0028] See attached figure 1 , after the electrodes 9a, 9b and 10a, 10b, 10c, 10d are simultaneously applied with a suitable voltage, the active actuators 1a, 1b, 1c, and 1d have currents passing through them, and the actuators are simultaneously upward under the action of resistance thermal stress. The movement drives the racks 3 and 6 to move upwards. Under the action of the racks 3, the gear 4 rotates counterclockwise at a certain angle; then the electrodes 7a, 8a and 7b, 8b are energized, and the meshing control actuators 2a, 2b have current passing through them. Movement to the right under the action of resistance thermal stress, rack 3 is out of mesh with gear 4, rack 6 is in mesh with gear 4; electrodes 9a, 9b and 10a, 10b, 10c, 10d are powered...

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Abstract

The invention relates to an electrothermal drive-based stepping micro-rotation device, which is used for converting reciprocating linear motion of an electrothermal actuator into rotary gear motion. The device consists of a driving actuator, a meshing control actuator, a rack and a gear. The whole device is made of a polycrystalline silicon material, is manufactured by a micro-electromechanical system (MEMS) surface silicon process and is not required to be assembled. The device converts the reciprocating linear motion of the actuator into rotary gear motion, is simple in structure and high in output efficiency and can be applied to MEMS devices such as micro grippers, micro operating tables and micro motors with the rack.

Description

technical field [0001] The invention relates to micro-actuators in the technical field of micro-electro-mechanical systems, in particular to a stepping and micro-rotating device based on electrothermal drive, which is used to convert the reciprocating linear motion generated by the electrothermal actuator into the rotational motion of gears. Background technique [0002] The actuator is the executive part of MEMS, which undertakes important functions such as energy conversion and motion transmission. According to the energy source, it is divided into electrical energy, chemical energy, fluid energy and thermal energy actuation methods. Electric actuators use electric charge force, magnetic field force, etc. to generate actuation, with fast response speed and low power consumption, but small output displacement and high voltage required, such as piezoelectric, electromagnetic and electrostatic. Due to its low power consumption, high operating frequency, high designability and...

Claims

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Application Information

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IPC IPC(8): H02K37/24
Inventor 沈雪瑾王振禄周玲陈晓阳胡懿
Owner SHANGHAI UNIV
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