Transducer-type vacuum gauge

A sensor and vacuum gauge technology, applied in the field of sensor-type vacuum gauges, can solve problems such as increasing operating costs, and achieve the effects of reducing operating costs, being easy to use, and saving space.

Inactive Publication Date: 2012-11-14
ULVAC INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, although the filaments used in each sensor part of a Pirani vacuum gauge or a hot cathode ionization vacuum gauge are so-called consumables, there is a large difference in the time of disconnection of them, and it is caused by a disconnection of one wire, etc.

Method used

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  • Transducer-type vacuum gauge
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  • Transducer-type vacuum gauge

Examples

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Embodiment Construction

[0020] Hereinafter, with reference to the accompanying drawings, a vacuum processing device such as a sputtering device or a CVD device is used as a measurement object sealed and stored, and a case where the pressure measurement is carried out in the vacuum processing device is taken as an example to describe the sensor-type vacuum sensor according to the embodiment of the present invention. count.

[0021] refer to figure 1 , VC is a vacuum chamber of a vacuum processing device. The vacuum chamber VC is set to have a vacuum exhaust system composed of a turbomolecular pump P1 and a diaphragm pump P2 on its back pressure side via a pipeline VL, and can be pumped from atmospheric pressure to high vacuum. vacuum. A mounting portion CP1 having a flange is formed on a side wall of the vacuum chamber VC, and the main body 11 of the sensor-type vacuum gauge 1 of the present embodiment is detachably mounted on the mounting portion CP1. The main body 11 is composed of a casing, and o...

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Abstract

Provided is a transducer-type vacuum gauge with low running cost, capable of measuring pressures at a plurality of positions in accordance with an object to be measured without impairing the features of saving space, reducing power or lowered cost. A body (11) attachable to a vacuum chamber (VC) is provided, and sensor parts (15, 16, 17), a first detection means (19), a first power source (E1) supplying power necessary for pressure measurement, and a control means (C) for controlling the operation of the first power source and measuring pressure by processing the output from the first detection means are integrally mounted on the body (11). A second detection means including a sensor part, which can share the changing range of pressure of the vacuum chamber with the first detection means and detect the pressure, can be connected to the body through wiring. A second power source (E2), which supplies the second detection means with the power necessary for measurement, is provided in the body (11), and measurement of the pressure can be implemented by incorporating in the control means the output from the second detection means.

Description

technical field [0001] The present invention relates to a sensor-type vacuum gauge for measuring the pressure of an object to be measured that is sealed and stored in a vacuum chamber or the like. Background technique [0002] Conventionally, a so-called sensor-type vacuum gauge is known as a vacuum gauge that is attached to a measurement target that is sealed and stored, such as a vacuum chamber, to measure the pressure in the target. This sensor-type vacuum gauge is constituted by integrally assembling in a casing (main body): a detection device having a sensor unit; a power supply for supplying electric power required for pressure measurement; controlling the activation of the power supply and performing pressure measurement by processing the output from the detection device control equipment. With such a structure, it is possible to achieve space saving, power consumption reduction and cost saving (for example, refer to Patent Document 1). [0003] In addition, in vacu...

Claims

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Application Information

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IPC IPC(8): G01L21/00G01L21/12G01L21/32
CPCG01L21/12G01L21/32
Inventor 中岛丰昭宫下刚永田宁福原万沙洋内田康文
Owner ULVAC INC
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