Rigidity-controllable small grinding tool polishing disc based on magnetorheological fluid and polishing method

Abstract

The invention discloses a rigidity-controllable small grinding tool polishing disc based on magnetorheological fluid. The rigidity-controllable small grinding tool polishing disc comprises a rotating shaft, a basement, a candan universal joint, a current coil, an iron core, a mechanical sealing part, magnetorheological fluid, a polishing layer and a peripheral circuit. The basement is in central symmetry with the rotating shaft, the candan universal joint is connected with the rotating shaft, the current coil is connected with an electric brush, arranged around the outside of the iron core and placed in the basement, the basement is embedded in the mechanical sealing part and forms a sealing structure, the magnetorheological fluid is sealed between the mechanical sealing part and the basement, the polishing layer is arranged at the outer bottom of the mechanical sealing part and firmly attached onto the upper surface of a workpiece to be polished, the electric brush is fixedly connected onto the rotating shaft, and the peripheral circuit is connected with the electric brush and used for regulating current of the current coil and controlling modulus of elasticity of the magnetorheological fluid. The invention further discloses a polishing method of the rigidity-controllable grinding tool based on the magnetorheological fluid, the polishing method solves the problems that pressure distribution is uneven, a rigid grinding disc cannot match with the shape of a surface of the workpiece to be processed in manufacturing of the rigid grinding disc, and processing efficiency and accuracy are improved.

Description

technical field [0001] The invention belongs to the field of advanced optical manufacturing, and specifically relates to a magneto-rheological fluid-based small abrasive polishing disc with controllable stiffness and a polishing method. Background technique [0002] Modern optical systems put forward extremely strict requirements on the surface quality of optical components. Weapons and equipment, space observation, laser nuclear fusion, extreme ultraviolet lithography, etc. not only require optical components to have extremely high surface accuracy, but also require full frequency band error distribution. Make strict controls. Compared with the traditional technology, the current computer-controlled optical surface shaping technology (CCOS) can greatly improve the processing efficiency, and has the advantages of simple equipment and low cost, and has gradually become the main method of processing aspheric surfaces. However, due to the inconsistency between the rigid small ...

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Problems solved by technology

[0006] In order to solve the problem of inconsistency with the surface of the workpiece and uneven force when the small abrasive tool is polished, and effectively suppress the serious intermediate frequency error or waviness error caused by the traditional rigid small abrasive tool polishing, the purpose of the present invention is to provide a method based on Stiffness controllable small abrasive polishing disc of magnetorheological fluid and method for realizing polishing

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