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Polysilicon purification furnace observation window

A polysilicon and observation window technology, which is applied to the growth of polycrystalline materials, crystal growth, silicon compounds, etc., can solve the problems of unsatisfactory observation windows of smelting equipment, affecting the temperature measured by infrared thermometers, etc., to achieve good sealing, reduce Pollution, the effect of improving the effect of use

Inactive Publication Date: 2012-11-21
WUJIANG YATAI VACUUM EQUIP TECH
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Problems solved by technology

[0003] In order to solve the problem that the observation window effect of the existing smelting equipment is not ideal and affects the temperature measurement of the infrared thermometer, the present invention provides the following technical solutions:

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  • Polysilicon purification furnace observation window
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Embodiment Construction

[0029] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.

[0030] as attached figure 1 And attached figure 2 As shown, the observation window of the polysilicon purification furnace is mainly composed of an observation glass window, a rotating glass lens, a rotating mechanism and a sealing mechanism.

[0031] The observation glass window is composed of the observation glass compression flange 1 and the observation glass lower flange 2, and the intermediate glass observation lens 4 is combined by bolts through the sealing rubber ring 3. The lower flange 2 of the observation glass is welded together with the connecting pipe 5 of the observation port, and the other end of the connecting pipe 5 of the obse...

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Abstract

The invention provides a polysilicon purification furnace observation window. The observation window comprises an observation lens and a rotation lens which are arranged on a polysilicon purification furnace, the observation lens is arranged on the polysilicon purification furnace through an observation port connection pipeline, and the rotation lens is connected with a small rotation shaft. The observation window has the following advantages: the pollution of silicon vapor to the observation window is prevented through the rotation lens, and the rotation lens cleans pollutants on the surfaces of the rotation lens through the rotation of the small rotation shaft, so the observation effect of the observation window is improved, and the pollution to the observation is reduced; the pollutants on the rotation lens can be cleaned by itself through the rotation, so the equipment maintenance is convenient; and a case that vacuum sealing rings are not affected by a high temperature is guaranteed through the cooling effect of a water jacket, so the good sealing performance of a system is guaranteed.

Description

technical field [0001] The invention relates to the field of solar energy equipment manufacturing, in particular to a polysilicon vacuum purification smelting furnace and an observation window in a high temperature state of polysilicon ingot casting equipment. Background technique [0002] Polysilicon vacuum purification smelting furnace and polysilicon ingot casting equipment are special equipment for manufacturing silicon ingots for solar cells. The manufacture of polysilicon ingots must be melted at high temperature in a vacuum state, and the general temperature must reach above 1500 ℃. In the process of silicon ingots, it is necessary to carry out actual observation and infrared detection of the actual internal conditions in the high temperature state. The current observation window is made of quartz glass straight-through. Due to the large amount of high temperature silicon vapor evaporation in the high temperature state, the glass surface of the observation window It i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/037C30B28/06
Inventor 李荣华
Owner WUJIANG YATAI VACUUM EQUIP TECH
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