Alumina-based ceramic, ceramic radiating substrate and preparation method for ceramic radiating substrate
A heat dissipation substrate and aluminum oxide technology, which is applied in the field of microelectronic materials, can solve the problems of poor heat dissipation performance of ceramic heat dissipation substrates, and achieve the effects of enhancing the overall heat dissipation capability, improving heat dissipation effect, and good heat dissipation performance
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[0033] Finally, the present invention provides a method for preparing a ceramic heat dissipation substrate, including the following steps:
[0034] A. The upper ceramic slurry is cast, dried and then punched and sintered to obtain the upper ceramic green body; then through holes are provided on the upper ceramic green body to form an upper ceramic green body with through holes to obtain the first layer;
[0035] B. Casting the middle ceramic slurry, drying and punching side by side to obtain the middle ceramic green body; casting the lower ceramic slurry, drying and punching side by side to obtain the lower ceramic green body; the lower ceramic slurry contains lower ceramics A mixed system of powder and first organic additive, the lower ceramic powder contains 80-100 parts by weight of alumina, 10-20 parts by weight of lanthanum strontium manganate and 5-50 parts by weight of sintering aid; manganese acid The chemical formula of strontium lanthanum is La x Sr 1-x MnO 3 , Where x=...
Example Embodiment
[0053] Example 1
[0054] (1) Disperse 100 parts by weight of LTCC glass powder in 60 parts by weight of organic additives (ethanol, xylene, polyvinyl butyral, polyethylene glycol with a volume ratio of 10:10:1:1) to form On the ceramic slurry; then cast a ceramic film with a thickness of 0.5um, dry it at 60 ℃, after punching, and then discharge the glue at 850 ℃ for 2 hours, and then sinter at 1650 ℃ for 2 hours to obtain the ceramic green body; The ceramic green body is cut through holes to obtain the first layer.
[0055] (2) Disperse 100 parts by weight of alumina powder in 60 parts by weight of organic additives (ethanol, xylene, polyvinyl butyral, polyethylene glycol with a volume ratio of 10:10:1:1) to form Medium ceramic slurry; then cast a ceramic film with a thickness of 0.5um, dry it at 60°C and punch it, and then discharge the glue at 850°C for 2h to obtain a medium ceramic green body.
[0056] (3) 100 parts by weight of alumina and 15 parts by weight of lanthanum stron...
Example Embodiment
[0060] Example 2
[0061] The ceramic heat dissipation substrate S2 of this embodiment is prepared by the same steps as in embodiment 1, except that:
[0062] In step (3), lanthanum strontium manganate (La x Sr 1-x MnO 3 , X=0.20) The dosage is 5 parts by weight.
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