Production method of molybdenum alloy tube target
A production method and technology of molybdenum alloy, applied in metal material coating process, ion implantation plating, coating and other directions, to achieve the effect of fine grain, uniform composition and tight bonding
Active Publication Date: 2012-12-05
烟台希尔德材料科技有限公司
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The casting method can only be used for target materials with low melting points such as Sn and Zn
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[0025] The purpose of the invention is to produce a molybdenum alloy tube target with uniform composition, no segregation, small crystal grains and high purity, which can meet the requirements of the liquid crystal display and touch screen industries. The production method employed involves the following main steps:
[0026] (1) Preparation of pre-alloy powder: (a) Prepare initial billet by mixing, pressing, and sintering metal Mo powder and alloy element powder; (b) Prepare pre-alloy powder by pulverizing the initial billet. The purpose of preparing pre-alloyed powder is to avoid or reduce the segregation phenomenon that may occur due to the difference in density and size between Mo powder particles and alloy element powder particles during charging. In order to avoid the excessive collision and friction between the initial blank and the crushing equipment, thereby causing the contamination of the pre-alloyed powder, the present invention first uses liquid nitrogen to tre...
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The invention relates to a production method of a molybdenum alloy tube target. Prealloy powders are put in a special packet and subjected to hot isostatic pressing under vacuum to form the tube target. The special packet comprises a stainless steel inner tube and a low-carbon steel outer tube, which are arranged coaxially and a fixing seat for fixing the two ends of each of the stainless steel inner tube and the low-carbon steel outer tube. The stainless steel inner tube is suitable for serving as a non-magnetic or weakly-magnetic stainless steel tube of liner tube of the molybdenum alloy tube target, and the wall thickness of the low-carbon steel outer tube is less than that of the stainless steel inner tube, and the difference between the inside diameter of the low-carbon steel outer tube and the outside diameter of the stainless steel inner tube is 2.1-2.3 times of the thickness of the target tube. An exhaust tube is pre-welded on the low-carbon steel outer tube. The temperature of hot isostatic pressing is 1000 DEG C to 1200 DEG C, and the pressure is more than or equal to 100 MPa. The molybdenum alloy tube target product has the advantages of uniform component, no visible segregation, close joint of the target tube and the liner tube, fine grains and high purity, and can meet the requirements for liquid crystal display and touch screens.
Description
technical field [0001] The invention relates to a production method of a molybdenum alloy tube target, in particular to a production method of a molybdenum alloy tube target that can meet the requirements of the liquid crystal display and touch screen industries. Background technique [0002] Molybdenum alloy targets made by adding one or more alloy elements to molybdenum are widely used in sputtering to prepare thin film electrodes and thin film wiring in liquid crystal display (LCD) and touch screen (TP). The alloying elements added therein can be Cr, Hf, Nb, Ta, Ti, V, W, etc. In the past, molybdenum alloy targets were mostly made into flat plates. Since there is no relative movement with the magnetic field in the sputtering equipment, the utilization rate of this type of planar target is only about 30%. This not only causes a waste of target material, but also because the replacement of the target must interrupt the work of the sputtering equipment, which has a great i...
Claims
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Login to View More IPC IPC(8): B22F5/10B22F3/14C23C14/34C23C14/14
Inventor 钟小亮王广欣王树森
Owner 烟台希尔德材料科技有限公司