Photochemical deposition device for solar cells

Abstract

The invention relates to a photochemical deposition device for solar cells, which comprises a solution supplementing system and a deposition system, wherein the liquid supplementing system comprises a liquid supplementing chamber for containing a reaction solution; the bottom in the liquid supplementing chamber is provided with a first heater, and the upper part is provided with a first on-line temperature monitoring device; the liquid supplementing chamber is provided with a liquid output pipeline for delivering the liquid to the deposition system; a filter unit is arranged above the liquid output pipeline; the liquid output pipeline is provided with a liquid flowmeter; the deposition system comprises a deposition reaction chamber; the bottom of the deposition reaction chamber is provided with a second heater, a bubbling device, a time controller and a circulating device; a vacuum adsorption device for fixing a silicon wafer into the deposition reaction chamber is installed in the deposition reaction chamber; and the upper part is provided with a second on-line temperature monitoring device and an illumination system. The invention can be used for depositing a low-cost non-defective silicon dioxide film.

Description

technical field [0001] The invention belongs to the technical field of solar cell preparation, and in particular relates to a photochemical deposition device for solar cells. Background technique [0002] In recent years, the environment and energy have gradually become the main issues of the 21st century. With the gradual reduction of fossil fuels such as petroleum and the huge damage caused by environmental pollution to the earth, energy issues have increasingly become a bottleneck restricting the development of the international society and economy. Solar photovoltaic will become the main body of the world's energy supply in the near future. It is estimated that by 2040, renewable energy will account for more than 50% of the total global energy consumption, and solar photovoltaic power generation will account for more than 20% of the total electricity; by the end of the 21st century, Renewable energy will account for more than 80% of the global energy structure, and solar...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of the introduction of defects and high production costs in the existing silicon dioxide film growth process, the present invention provides a low-cost, non-damaging silicon dioxide film deposition solar cell photochemical deposition device

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