Composition for light absorption film formation containing blocked isocyanate compound and antireflection film formed therefrom
An anti-reflection coating, radiation absorbing technology, applied in the field of radiation absorbing coatings such as anti-reflection coatings, compositions for forming radiation absorbing coatings, can solve deposition, adverse effects of anti-reflection coating performance, resist image deformation, etc.
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Embodiment 1
[0035] Example 1 Synthesis of blocked isocyanate group-containing polymer 1
[0036] At room temperature, 38.3 g (0.44 mol) of 2-butanone oxime was mixed with 550 g of tetrahydrofuran to prepare a homogeneous solution. Under stirring, 62g (0.4mol) of 2-isocyanatoethyl methacrylate was added dropwise to the solution, and after the mixture was stirred at room temperature for 3 hours, 40g (0.4mol) of methyl methacrylate was added in 100g Solution in tetrahydrofuran and 4.6 g of azobisisobutyronitrile (AIBN initiator). After the solution was stirred for 20 minutes under a nitrogen atmosphere, polymerization was carried out at 65° C. for 7 hours. After the reaction was completed, the reaction solution was cooled to room temperature, and precipitated in hexane. The resulting white powdery product was filtered off, washed with hexane, and dried in vacuo to obtain 110 g of a polymer containing isocyanate groups capped with 2-butanone oxime. GPC analysis using tetrahydrofuran as mob...
Embodiment 2
[0037] Example 2 Synthesis of blocked isocyanate-containing polymer 2
[0038] At room temperature, 38.3 g (0.44 mol) of 2-butanone oxime was mixed with 550 g of tetrahydrofuran to prepare a homogeneous solution. Under stirring, 62 g (0.4 mol) of 2-isocyanatoethyl methacrylate was added dropwise to the solution, and after the mixture was stirred at room temperature for 3 hours, 70.4 g (0.4 mol) of benzyl methacrylate was added thereto Solution in 150 g tetrahydrofuran and 4.6 g AIBN. After the solution was stirred for 20 minutes under a nitrogen atmosphere, polymerization was carried out at 65°C for 8 hours. After the reaction was completed, the reaction solution was cooled to room temperature, and precipitated in hexane. The resulting white powdery product was filtered off, washed with hexane, and dried in vacuo to obtain 120 g of an isocyanate group-containing polymer capped with 2-butanone oxime. GPC analysis using tetrahydrofuran as mobile phase and polystyrene as stand...
Embodiment 3
[0039] Example 3 Synthesis of blocked isocyanate-containing polymers 3
[0040] At room temperature, the 2-butanone oxime of 55.5g is dissolved in the propylene glycol methyl ether acetate (PGMEA) of 145g, in the solution obtained, add the polycondensation resin of phenyl diisocyanate and formaldehyde sold by Aldrich company of 50g , followed by stirring for more than 10 hours to obtain a solution of a polymer in which the isocyanate groups are blocked. The amount of PGMEA added to the reaction solution should make the concentration of the polycondensation resin 10wt%. This solution will be used below as a solution for preparing a composition for forming an antireflection coating.
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