Inertia sensing apparatus

Abstract

The invention relates to an inertia sensing apparatus, comprising a substrate, a first and second inertia sensing elements. The first inertia sensing element is connected to a substrate and has a containment space. The second inertia sensing element is connected to the substrate and is disposed in the containment space of the first inertia sensing element, wherein the first inertia sensing element and the second sensing element are connected to the substrate, and the first inertia sensing element and the second sensing element are not connected to each other, the first inertia sensing element and the second sensing element individually and independently detect at least one inertia motion of the inertia sensing apparatus. Therefore, the invention is based on the second inertia sensing element disposed in the containment space of the first inertia sensing element and they individually and independently detect at least one inertia motion of the inertia sensing apparatus, so as to decrease an area of the inertia sensing apparatus, thus reducing the chip size and prevent the two inertia sensing elements from coupling to result in decreasing the sensing precision.

Description

technical field [0001] The invention relates to an inertial sensing device, in particular to an inertial sensing device which can save the overall chip area and improve sensing accuracy. Background technique [0002] In today's consumer electronics industry, in order to improve the functions of electronic products, it is necessary to provide a sensing device capable of accurately measuring inertial motion, such as an inertial sensing unit for the physical quantity of acceleration or angular velocity. In general, acceleration in any direction and angular velocity in any direction of rotation act on an object freely moving in three-dimensional space. Therefore, in order to accurately grasp the motion of the object, it is necessary to measure the acceleration along each coordinate axis of the XYZ three-dimensional coordinate system and the angular velocity around each coordinate axis. Therefore, there is a need for an inertial sensing device having a compact size and high prec...

AI Technical Summary

Problems solved by technology

As the size shrinks, the difference caused by the mass asymmetry of the Z-axis accelerometer will not be obvious, so that the displacement of the mass block decreases and the capacitance change value decreases, which makes it difficult for the capacitance sensing circuit to detect

[0006] And another way to increase the output signal is to increase the mass of the accelerometer, and use a larger mass block to simultaneously sense the acceleration values ​​of the three axes. Today's acceleration sensing device 1' has three accelerometers Integrated together, and three accelerometers are connected together to increase the efficiency of sensing, but because the three accelerometers are connected together, it is easy to generate noise because the three will affect each other, which will affect the accuracy of its acceleration sensing Spend

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