Method of using ceramic precursors to prepare patterned ceramic

A ceramic precursor and patterning technology, applied in the field of patterned ceramics, can solve the problems of limited application, poor high temperature resistance of oxygen-containing ceramics, etc., and achieve the effect of wide application value and fine pattern

Active Publication Date: 2013-01-09
LVNA TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the use of polysiloxane solves the problem of mold release, the poor high temperature resistance of oxygen-containing ceramics limits its application

Method used

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  • Method of using ceramic precursors to prepare patterned ceramic
  • Method of using ceramic precursors to prepare patterned ceramic

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] Using a copper badge as a master mold (diameter 20mm, thickness 2mm), mix 5g polydimethylsiloxane (PDMS) and 0.5g crosslinking agent evenly. Take 1g of PDMS solution mixed evenly and drop it into a metal box 1.2 times the size of the master mold, ultrasonically remove air bubbles for 10 minutes, then place it in a 70°C oven for 15 minutes, then put the master mold into the metal box, and place it in the oven for 70 Continue heating at ℃ for 6h. After the PDMS is solidified, 1.5g of PDMS solution is added dropwise on it, ultrasonicated for 10min to remove air bubbles, and then placed in an oven at 70°C for 6h. After the PDMS is solidified, the master mold is separated to obtain a PDMS mold with a mold cavity in the shape of the master mold. Add 5% photoinitiator I819 to the liquid ceramic precursor polysilazane (PSN), stir magnetically at 110°C for 1 hour, stir evenly and inject it into the cavity of the PDMS mold, and then place it at 220mw / cm 2 Irradiate under the ul...

Embodiment 2

[0021] Still using a copper badge as the master mold (diameter 20mm, thickness 2mm), mix 5g of polydimethylsiloxane (PDMS) and 0.5g of cross-linking agent evenly. Take 1g of PDMS solution mixed evenly and drop it into a metal box 1.2 times the size of the master mold, ultrasonically remove air bubbles for 10 minutes, then place it in a 70°C oven for 15 minutes, then put the master mold into the metal box, and place it in the oven for 70 Continue heating at ℃ for 6h. After the PDMS is solidified, add 1.5g of PDMS dropwise on it, ultrasonicate for 10 minutes to remove air bubbles, and then place it in an oven and heat at 70°C for 6 hours. After the PDMS is solidified, the master mold is removed to obtain a PDMS mold with a badge pattern cavity. Add 5% thermal initiator DCP to the liquid precursor polysilazane (PSN), stir magnetically at 40°C for 1h, stir evenly, inject into the cavity of the PDMS mold, and then heat in an oven at 130°C for 6h to cure Finally, the PDMS mold was...

Embodiment 3

[0023] Using a steel coin as the master mold (diameter 25mm, thickness 2mm), mix 5g polydimethylsiloxane (PDMS) and 0.5g crosslinking agent evenly. Take 1.5g of the PDMS solution that has been mixed evenly and drop it into a metal box that is 1.2 times the size of the master mold, vacuumize to remove air bubbles, and then heat it in a 90°C oven for 5 minutes, then put the master mold into the metal box and place it in the oven Continue heating at 90°C for 20 minutes. After the PDMS is solidified, add 2g of PDMS dropwise on it, vacuumize to remove air bubbles, and then place it in an oven and heat at 50°C for 10h. After the PDMS is solidified, the master mold is peeled off to obtain a PDMS mold with a coin pattern cavity. Add 5% photoinitiator I819 to the liquid precursor polysilazane (PSN), stir magnetically at 110°C for 1 hour, stir evenly and inject it into the cavity of the PDMS mold, and then place it at 220mw / cm 2 Irradiated under a UV lamp for 15 minutes. After curing,...

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Abstract

The invention relates to patterned ceramic, in particular to a method of using ceramic precursors to prepare patterned ceramic. The method includes: mixing polydimethylsiloxane with crosslinking agent, adding the mixture into a metal box, heating, placing in a master pattern, heating until PDMS (polydimethylsiloxane) is solidified, adding liquid PDMS, placing in a drying oven for solidification, and taking out the master pattern to obtain a PDMS mould with a mould cavity identical to the master pattern in shape; mixing the ceramic precursors with initiator, injecting the mixture into the mould cavity of the PDMS mould, and stripping the PDMS mould after the ceramic precursors in the mould cavity are solidified to obtain solidified patterned ceramic precursors; heating the solidified patterned ceramic precursors, and taking out the solidified patterned ceramic precursors after cooling to obtain patterned ceramic. The method is simple, feasible, safe, efficient and applicable to various ceramic precursors, can be used for preparing crack-free and high-precision three-dimensional ceramic with various fine patterns, and can be widely applied to the fields of high-temperature MEMS (micro electromechanical system) devices, engine parts, micro engine combustors, chemical reactors and the like.

Description

technical field [0001] The invention relates to a patterned ceramic, in particular to a method for preparing a patterned ceramic from a ceramic precursor. Background technique [0002] Microelectromechanical systems (MEMS) are booming all over the world, and various MEMS devices, such as inkjet print heads, pressure sensors, flow meters, accelerometers, gyroscopes, uncooled infrared imagers and optical projectors based on MEMS technology And other equipment is continuously developed. At present, MEMS devices are mainly based on silicon micromachining technology, which limits the application of MEMS in high-temperature corrosion environments. Therefore, the development of high-temperature and corrosion-resistant MEMS devices is increasingly attracting the attention of researchers. [0003] The traditional ceramic powder sintering method is time-consuming and energy-consuming, and the prepared ceramic micro-devices have simple shapes, high porosity, low precision, and rough s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/515C04B35/56C04B35/622
Inventor 余煜玺陈兆云
Owner LVNA TECH CO LTD
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